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    A RADIATION SYSTEM AND METHOD
    1.
    发明申请
    A RADIATION SYSTEM AND METHOD 审中-公开
    辐射系统和方法

    公开(公告)号：WO2016146400A1

    公开(公告)日：2016-09-22

    申请号：PCT/EP2016/054570

    申请日：2016-03-03

    Applicant: ASML NETHERLANDS B.V.

    Inventor： JILISEN, Reinier, Theodorus, Martinus ,  SEROGLAZOV, Pavel ,  TSIGUTKIN, Konstantin ,  SMEETS, Dries ,  ZHAO, Chuangxin

    IPC: G03F7/20 ,  H05G2/00

    CPC classification number: G03F7/70033 ,  G03F7/70525 ,  G03F7/7085 ,  G03F7/70908 ,  H05G2/005 ,  H05G2/008

    Abstract: A radiation system for generating a radiation emitting plasma comprises a fuel emitter (3) configured to provide fuel (70) to a plasma formation region (4), a laser (1) arranged to provide a laser beam (2) at the plasma formation region incident on the fuel to generate a radiation emitting plasma (7), and an imaging device (10) arranged to obtain at least one image of an imaging region, the image indicating at least one property of the fuel and/or the radiation emitting plasma and/or debris. The imaging region is located between the fuel emitter and the plasma formation region, or the imaging region is located between the plasma formation region and a further component of the radiation system. The system further comprises a controller (11) configured to process the at least one image and to provide an instruction in dependence on said at least one property of the fuel and/or the radiation emitting plasma and/or debris.

    Abstract translation: 用于产生辐射发射等离子体的辐射系统包括被配置为向等离子体形成区域（4）提供燃料（70）的燃料发射器（3），被布置成在等离子体形成处提供激光束（2）的激光器 区域入射在燃料上以产生辐射发射等离子体（7）;以及成像装置（10），被配置为获得成像区域的至少一个图像，该图像表示燃料和/或辐射发射的至少一个性质 血浆和/或碎屑。 成像区域位于燃料发射器和等离子体形成区域之间，或者成像区域位于等离子体形成区域和辐射系统的另一部件之间。 该系统还包括控制器（11），其被配置为处理所述至少一个图像并根据燃料和/或发射等离子体和/或碎片的辐射的所述至少一个性质来提供指令。

    A RADIATION SOURCE
    3.
    发明申请
    A RADIATION SOURCE 审中-公开
    辐射源

    公开(公告)号：WO2016058746A1

    公开(公告)日：2016-04-21

    申请号：PCT/EP2015/070109

    申请日：2015-09-03

    Applicant: ASML NETHERLANDS B.V.

    Inventor： FRANKEN, Johannes, Christiaan, Leonardus ,  NIKIPELOV, Andrey, ,  SEROGLAZOV, Pavel ,  VAN SCHOOT, Jan, Bernard, Plechelmus ,  VANDERHALLEN, Ivo ,  YAKUNIN, Andrei, Mikhailovich ,  BOGAART, Erik, Willem ,  ZHAO, Chuangxin ,  VELTMAN, Robertus, Wilhelmus ,  JILISEN, Reinier, Theodorus, Martinus

    IPC: G03F7/20 ,  H05G2/00 ,  G21K1/04 ,  H01J37/32

    CPC classification number: G03F7/70916 ,  G03F7/70033 ,  G03F7/70041 ,  G03F7/70983 ,  G21K1/043 ,  H05G2/005 ,  H05G2/008

    Abstract: A radiation source (SO), which is operable to produce pulses of radiation, comprises: a wall (9,21) with an aperture (8,22); a radiation collector; a rotatable shield (200); and a drive mechanism (230) arranged to rotate the shield about a rotation axis (222). The radiation source may be a laser produced plasma source. The radiation collector is arranged to direct pulses of radiation along an optical axis of the radiation collector and focus the pulses of radiation at an intermediate focus, said optical axis passing through the aperture and said intermediate focus being in the vicinity of the aperture. The shield comprises a body (210) with one or more openings, said one or more openings forming a passageway extending through the body. The drive mechanism is arranged to rotate the shield such that the passageway is intermittently aligned with the aperture as each pulse of radiation reaches the shield to allow the pulses of radiation to pass through the aperture in the wall, and the body at least partially covers the aperture in between consecutive pulses of radiation. The rotation axis of the shield is generally perpendicular to the optical axis of the radiation collector.

    Abstract translation: 可操作以产生辐射脉冲的辐射源（SO）包括：具有孔径（8,22）的壁（9,21）; 辐射收集器 可旋转护罩（200）; 以及驱动机构（230），布置成围绕旋转轴线（222）旋转屏蔽件。 辐射源可以是激光产生的等离子体源。 辐射收集器被布置成沿着辐射收集器的光轴引导辐射脉冲，并将辐射脉冲聚焦在中间焦点处，所述光轴穿过孔径并且所述中间焦点在孔附近。 屏蔽包括具有一个或多个开口的主体（210），所述一个或多个开口形成延伸穿过主体的通道。 驱动机构被布置成旋转屏蔽件，使得当辐射的每个脉冲到达屏蔽件时，通道间歇地对准孔，以允许辐射脉冲通过壁中的孔，并且该主体至少部分地覆盖 连续的辐射脉冲之间的孔径。 屏蔽的旋转轴线大致垂直于辐射收集器的光轴。

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