Patent search ap:("ASML NETHERLANDS BV") AND inv:"BROUWER ERIC" Page 1

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发明专利
METHOD OF DETERMINING DOSE AND FOCUS, INSPECTION APPARATUS, PATTERNING DEVICE, SUBSTRATE AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2011816A

公开(公告)日：2014-06-04

申请号：NL2011816

申请日：2013-11-19

Applicant: ASML NETHERLANDS BV

Inventor： VANOPPEN PETER , BROUWER ERIC , BESTEN JAN , HINNEN PAUL , ENGELEN ADRIANUS , CRAMER HUGO

IPC: G01N21/47 , G03F7/20

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