Patent search ap:("ASML NETHERLANDS BV") AND inv:"ENGELEN ADRIANUS" Page 1

1.

发明专利
METHOD OF DETERMINING DOSE AND FOCUS, INSPECTION APPARATUS, PATTERNING DEVICE, SUBSTRATE AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2011816A

公开(公告)日：2014-06-04

申请号：NL2011816

申请日：2013-11-19

Applicant: ASML NETHERLANDS BV

Inventor： VANOPPEN PETER , BROUWER ERIC , BESTEN JAN , HINNEN PAUL , ENGELEN ADRIANUS , CRAMER HUGO

IPC: G01N21/47 , G03F7/20

2.

发明专利
METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, LITHOGRAPHIC APPARATUS, COMPUTER PROGRAM PRODUCT AND METHOD OF IMPROVING A MATHEMATICAL MODEL OF A LITHOGRAPHIC PROCESS. 未知

公开(公告)号：NL2008285A

公开(公告)日：2012-09-12

申请号：NL2008285

申请日：2012-02-14

Applicant: ASML NETHERLANDS BV

Inventor： ENGELEN ADRIANUS , MEGENS HENRICUS , MULKENS JOHANNES , KAZINCZI ROBERT , WANG JEN-SHIANG

IPC: G03F7/20

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