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公开(公告)号：NL2014008A
公开(公告)日：2015-07-20
申请号：NL2014008
申请日：2014-12-18
Applicant: ASML NETHERLANDS BV
Inventor： BUTLER HANS , HOON CORNELIUS ADRIANUS LAMBERTUS , KERP INGMAR AUGUST , MEIJERS PIETER JOHANNES GERTRUDIS , OOMS WESLEY , STARREVELD JEROEN PIETER , HOOPEN DERK , DUIJNHOVEN MARTINUS , HAGE EDWARD , DRAAIJER EVERT HENDRIK JAN
IPC: G03F7/20 , H01L21/683
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