Patent search ap:("ASML NETHERLANDS BV") AND inv:"FEENSTRA KORNELIS FRITS" Page 1

1.

发明专利
Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system. 未知

公开(公告)号：NL1036305A1

公开(公告)日：2009-06-23

申请号：NL1036305

申请日：2008-12-11

Applicant: ASML NETHERLANDS BV

Inventor： KRUIZINGA BORGERT , WEHRENS MARTIJN GERARD DOMINIQUE , NIJKERK MICHIEL DAVID , FEENSTRA KORNELIS FRITS

IPC: G01M11/02 , G03F7/20

Patent Agency Ranking