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    Lithographic device
    1.
    发明专利
    Lithographic device 有权
    LITHOGRAPHIC设备

    公开(公告)号：JP2010003687A

    公开(公告)日：2010-01-07

    申请号：JP2009138240

    申请日：2009-06-09

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： GLUSHKOV DENIS ,  BANINE VADIM YEVGENYEVICH ,  VLADIMIR VITALEVICH IVANOV ,  KOSHELEV KONSTANTIN NIKOLAEVITCH ,  ZUKAKISHVILI GIVI GEORGIEVICH ,  KRIVTSUN VLADIMIR MIHAILOVITCH ,  SIDELNIKOV YURII VICTOROVITCH ,  GIELISSEN KURT ,  YAKUSHEV OLEG

    IPC: H05G2/00 ,  G03F7/20 ,  H01L21/027

    CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05G2/008

    Abstract: PROBLEM TO BE SOLVED: To provide a discharge forming plasma radiation source, and a method of forming radiation using the discharge forming plasma radiation source to reduce the number of formed high-speed (high-energy) ions.
    SOLUTION: The discharge forming plasma radiation source includes a laser beam pulse generator constituted so as to induce a pinch in the plasma of the discharge forming plasma radiation source by providing a laser beam pulse. The laser beam pulse generator is constituted so as to provide the laser beam pulse having larger energy than the most suitable laser beam pulse energy corresponding to the maximum output of the radiation of a prescribed wavelength with respect to prescribed discharge energy.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种放电形成等离子体辐射源，以及使用放电形成等离子体辐射源形成辐射的方法，以减少形成的高速（高能）离子的数量。 解决方案：放电形成等离子体辐射源包括激光束脉冲发生器，其被构造成通过提供激光束脉冲在放电形成等离子体辐射源的等离子体中引起夹紧。 激光束脉冲发生器被构造成提供激光束脉冲，其具有比对应于规定波长的辐射的最大输出相对于规定的放电能量的最合适的激光束脉冲能量更大的能量。 版权所有（C）2010，JPO＆INPIT

    Debris reducing system and lithographic device
    3.
    发明专利
    Debris reducing system and lithographic device 有权
    DEBRIS还原系统和LITHOGRAPHIC设备

    公开(公告)号：JP2008166772A

    公开(公告)日：2008-07-17

    申请号：JP2007328130

    申请日：2007-12-20

    Applicant: Asml Netherlands Bv ,  Koninkl Philips Electronics Nv ,  エーエスエムエル ネザーランズ ビー.ブイ. ,  コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ

    Inventor： WILHELMUS VAN HERPEN MAARTEN M ,  KLUNDER DERK JAN WILFRED ,  SOER WOUTER ANTHON ,  GIELISSEN KURT

    IPC: H01L21/027

    CPC classification number: G03F7/70916 ,  G03F7/70858 ,  H05G2/003 ,  H05G2/005

    Abstract: PROBLEM TO BE SOLVED: To provide a debris reducing system, used for trapping pollutant materials emitted from a radiation source which generates debris, and can make debris reduction effect improved by a rotation foil trap.
    SOLUTION: This debris reducing system is provided with a contamination barrier constituted so as to rotate about a shaft, and a magnet structure, constituted so as to provide a magnetic field for deflecting electric charge debris from the radiation source. The magnet structure is constituted so that magnetic field is provided through the contamination barrier. The magnetic field is oriented along a surface which substantially coincides with the rotating shaft of the contamination barrier, when it passes through the contamination barrier.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种用于捕获从辐射源发射的污染物质的碎屑减少系统，其产生碎片，并且可以通过旋转箔捕获器改善碎屑减少效果。 解决方案：该碎屑减少系统设置有围绕轴旋转构成的污染屏障，以及磁体结构，其构造成提供用于使来自辐射源的电荷碎屑偏转的磁场。 构造磁体结构，使得通过污染屏障提供磁场。 当磁场穿过污染屏障时，磁场沿着基本上与污染屏障的旋转轴重合的表面定向。 版权所有（C）2008，JPO＆INPIT

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