公开(公告)号：NL2005111A

公开(公告)日：2011-02-22

申请号：NL2005111

申请日：2010-07-19

Applicant: ASML NETHERLANDS BV

Inventor： JAK MARTIN ,  BANINE VADIM ,  HERPEN MAARTEN ,  SOER WOUTER ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  G21K1/06

公开(公告)号：NL2004706A

公开(公告)日：2011-01-25

申请号：NL2004706

申请日：2010-05-12

Applicant: ASML NETHERLANDS BV

Inventor： SOER WOUTER ,  HERPEN MAARTEN ,  GIELISSEN KURT ,  JAK MARTIN

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2005189A

公开(公告)日：2011-03-28

申请号：NL2005189

申请日：2010-08-02

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  BANINE VADIM ,  HERPEN MAARTEN ,  SOER WOUTER ,  JAK MARTIN

IPC: G03F7/20 ,  G21K1/06

Abstract: A spectral purity filter, in particular for use in a lithographic apparatus using EUV radiation for the projection beam, includes a plurality of apertures in a substrate. The apertures are defined by walls having side surfaces that are inclined to the normal to a front surface of the substrate.

公开(公告)号：NL2003299A

公开(公告)日：2010-03-11

申请号：NL2003299

申请日：2009-07-28

Applicant: ASML NETHERLANDS BV

Inventor： HERPEN MAARTEN ,  SOER WOUTER

IPC: G02B5/26 ,  G03F7/20

公开(公告)号：NL2005118A

公开(公告)日：2011-02-22

申请号：NL2005118

申请日：2010-07-21

Applicant: ASML NETHERLANDS BV

Inventor： SOER WOUTER ,  BANINE VADIM ,  HERPEN MAARTEN ,  YAKUNIN ANDREI ,  JAK MARTIN

IPC: G03F7/20 ,  G21K1/06

Abstract: A spectral purity filter includes a plurality of apertures extending through a member. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation, A first region of the spectral purity filter has a first configuration that results in a first radiation transmission profile for the radiation having the first wavelength and the radiation having the second wavelength, and a second region of the spectral purity filter has a second, different configuration that results in a second, different radiation transmission profile for the radiation having the first wavelength and the radiation having the second wavelength.

公开(公告)号：NL2003303A

公开(公告)日：2010-03-11

申请号：NL2003303

申请日：2009-07-29

Applicant: ASML NETHERLANDS BV

Inventor： SOER WOUTER ,  HERPEN MAARTEN ,  JAK MARTIN

IPC: G03F7/20 ,  G21K1/06

Abstract: A spectral purity filter includes an aperture. The spectral purity filter is configured to enhance the spectral purity of a radiation beam by being configured to absorb radiation of a first wavelength and allow at least a portion of radiation of a second wavelength to transmit through the aperture. The first wavelength is larger than the second wavelength. The spectral purity filter may be used to improve the spectral purity of an Extreme Ultra-Violet (EUV) radiation beam.