Patent search ap:("ASML NETHERLANDS BV") AND inv:"GUNTER PIETER" Page 1

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发明专利
A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2009272A

公开(公告)日：2013-03-04

申请号：NL2009272

申请日：2012-08-03

Applicant: ASML NETHERLANDS BV

Inventor： THOMAS IVO , VERSPAGET COEN , HAM RONALD , LAURENT THIBAULT , CORCORAN GREGORY , BLOKS RUUD , PIETERSE GERBEN , GUNTER PIETER

IPC: G03F7/20

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