公开(公告)号：NL2009272A

公开(公告)日：2013-03-04

申请号：NL2009272

申请日：2012-08-03

Applicant: ASML NETHERLANDS BV

Inventor： THOMAS IVO ,  VERSPAGET COEN ,  HAM RONALD ,  LAURENT THIBAULT ,  CORCORAN GREGORY ,  BLOKS RUUD ,  PIETERSE GERBEN ,  GUNTER PIETER

IPC: G03F7/20

公开(公告)号：NL2007439A

公开(公告)日：2012-04-23

申请号：NL2007439

申请日：2011-09-19

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  DAM MARINUS ,  JASPER JOHANNES ,  HAM RONALD ,  SHULEPOV SERGEI ,  PIETERSE GERBEN ,  BARAGONA MARCO ,  DEBRAUWER PIETER ,  STEEN ANTONIUS

IPC: G03F7/20

Abstract: A gas manifold to direct a gas flow between two plates of an optical component of a lithographic apparatus, the gas manifold having an inlet, a diffuser downstream of the inlet, a flow straightener downstream of the inlet, a contractor downstream of the flow straightener, and an outlet downstream of the contractor.

公开(公告)号：NL2004808A

公开(公告)日：2011-01-12

申请号：NL2004808

申请日：2010-06-03

Applicant: ASML NETHERLANDS BV

Inventor： PATEL HRISHIKESH ,  STEFFENS KOEN ,  LEMPENS HAN ,  LIEROP MATHIEUS ,  METSENAERE CHRISTOPHE ,  SPRUYTENBURG PATRICK ,  VERSTRAETE JORIS ,  BLOKS RUUD ,  MIRANDA MARCIO ,  JACOBS JOHANNES ,  LIEBREGTS PAULUS ,  HAM RONALD ,  SIMONS WILHELMUS ,  DIRECKS DANIEL ,  JANSSEN FRANCISCUS ,  BERKVENS PAUL ,  BRANDS GERT-JAN

IPC: G03F7/20

Abstract: A fluid handling structure configured to supply and confine immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. The fluid handling structure includes a supply passage formed therein for the passage of fluid from outside the fluid handling structure to the space, and a thermal isolator positioned adjacent the supply passage at least partly to isolate fluid in the supply passage from a thermal load induced in the fluid handling structure.

公开(公告)号：NL2006272A

公开(公告)日：2011-11-07

申请号：NL2006272

申请日：2011-02-22

Applicant: ASML NETHERLANDS BV

Inventor： HAM RONALD ,  BARAGONA MARCO ,  GROEN ROBERTUS ,  MAESSEN RALPH ,  TOONDER JACOB ,  KOVACEVIC-MILIVOJEVIC MILICA ,  LEENDERS MARTINUS ,  MULKENS JOHANNES ,  MOERMAN RICHARD ,  RIEPEN MICHEL ,  SHULEPOV SERGEI ,  STEFFENS KOEN ,  CROMWIJK JAN ,  SONDAG-HUETHORST JEANNET

IPC: G03F7/20

公开(公告)号：NL2009692A

公开(公告)日：2013-06-10

申请号：NL2009692

申请日：2012-10-25

Applicant: ASML NETHERLANDS BV

Inventor： POLET THEODORUS ,  COX HENRIKUS ,  HAM RONALD ,  SIMONS WILHELMUS ,  WINKEL JIMMY ,  CORCORAN GREGORY ,  BOXTEL FRANK

IPC: G03F7/20

公开(公告)号：NL2003575A

公开(公告)日：2010-05-03

申请号：NL2003575

申请日：2009-09-30

Applicant: ASML NETHERLANDS BV

Inventor： STEFFENS KOEN ,  HAM RONALD ,  EUMMELEN ERIK

IPC: G03F7/20