公开(公告)号：KR20200135878A

公开(公告)日：2020-12-03

申请号：KR20207031525

申请日：2019-04-23

Applicant: ASML NETHERLANDS BV

Inventor： HEMPENIUS PETER PAUL ,  HOL SVEN ANTOIN JOHAN ,  KREMERS MAARTEN FRANS JANUS ,  VAN DE GROES HENRICUS MARTINUS JOHANNES ,  BOSCH NIELS JOHANNES MARIA ,  BAGGEN MARCEL KOENRAAD MARIE

IPC: H01J37/20 ,  H01J37/09 ,  H01J37/317

Abstract: e-빔장치가개시되고, 상기장치는대상물상으로 e-빔을투영하도록구성되는전자광학기시스템(500), 대상물을유지하는대상물테이블, 및전자광학기시스템에대해대상물테이블(520)을이동시키도록구성되는위치설정디바이스(510)를포함한다. 위치설정디바이스는전자광학기시스템에대해대상물테이블을이동시키도록구성되는단행정스테이지(512) 및전자광학기시스템에대해단행정스테이지를이동시키도록구성되는장행정스테이지(511)를포함한다. e-빔장치는위치설정디바이스에의해발생되는자기교란으로부터전자광학기시스템을차폐하기위한자기차폐부(540)를더 포함한다. 자기차폐부는위치설정디바이스와전자광학기시스템사이에배치될수 있다.

公开(公告)号：IL317381A

公开(公告)日：2025-02-01

申请号：IL31738124

申请日：2024-12-02

Applicant: ASML NETHERLANDS BV ,  HAARTSEN THOMAS IZAAK FRED ,  BOSCH NIELS JOHANNES MARIA ,  GRASMAN JASPER HENDRIK ,  SMEETS MARTIN FRANS PIERRE ,  SLOT ERWIN ,  PRIL WOUTER ONNO ,  HEMPENIUS PETER PAUL ,  CHEN TE YU

Inventor： HAARTSEN THOMAS IZAAK FRED ,  BOSCH NIELS JOHANNES MARIA ,  GRASMAN JASPER HENDRIK ,  SMEETS MARTIN FRANS PIERRE ,  SLOT ERWIN ,  PRIL WOUTER ONNO ,  HEMPENIUS PETER PAUL ,  CHEN TE-YU

IPC: H01J37/21

Abstract: The present disclosure relates to apparatus and methods for assessing samples using a plurality of charged particle beams. In one arrangement, at least a subset of a beam grid of a plurality of charged particle beams and respective target portions of a sample surface are scanned relative to each other to process the target portions. Signal charged particles from the sample are detected to generate detection signals. A sample surface topographical map is generated that represents a topography of the sample surface by analyzing the detection signals.

公开(公告)号：NL2008007A

公开(公告)日：2012-07-23

申请号：NL2008007

申请日：2011-12-21

Applicant: ASML NETHERLANDS BV

Inventor： BREUKERS MARCUS ,  HEERTJES MARCEL ,  BOSCH NIELS JOHANNES MARIA

IPC: G03F7/20

Abstract: A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.

公开(公告)号：NL2009902A

公开(公告)日：2013-07-01

申请号：NL2009902

申请日：2012-11-29

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  BLEEKER ARNO ,  HENNUS PIETER ,  HOEKS MARTINUS ,  HOL SVEN ANTOIN JOHAN ,  SCHOOT HARMEN ,  SLAGHEKKE BERNARDUS ,  TINNEMANS PATRICIUS ,  WIJST MARC ,  ZAAL KOEN ,  CADEE THEODORUS PETRUS MARIA ,  BEERENS RUUD ,  FISCHER OLOF ,  AANGENENT WOUTER ,  BOSCH NIELS JOHANNES MARIA

IPC: G03F7/20