公开(公告)号：NL2009591A

公开(公告)日：2013-05-23

申请号：NL2009591

申请日：2012-10-09

Applicant: ASML NETHERLANDS BV

Inventor： GOSEN JEROEN ,  NET ANTONIUS ,  HEUVEL LEONARDA ,  BOXTEL FRANK

IPC: G03F7/20

公开(公告)号：NL2009899A

公开(公告)日：2013-06-24

申请号：NL2009899

申请日：2012-11-28

Applicant: ASML NETHERLANDS BV

Inventor： GAAG MARC ,  HEUVEL LEONARDA ,  MARTENS ARJAN ,  BOXTEL FRANK

IPC: G03F7/20

Abstract: An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve, and a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.

公开(公告)号：NL2009378A

公开(公告)日：2013-04-09

申请号：NL2009378

申请日：2012-08-29

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  NET ANTONIUS ,  HEUVEL LEONARDA

IPC: G03F7/20

公开(公告)号：NL2008186A

公开(公告)日：2012-09-17

申请号：NL2008186

申请日：2012-01-26

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  GRAAF ROELOF ,  NET ANTONIUS ,  UIJTREGT JOHANNES ,  HEUVEL LEONARDA

IPC: G03F7/20