公开(公告)号：NL2008954A

公开(公告)日：2013-01-09

申请号：NL2008954

申请日：2012-06-07

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  GOSEN JEROEN ,  KUIJPER ANTHONIE ,  MARTENS ARJAN ,  DAMME JEAN-PHILIPPE ,  SCHOENMAKERS PETER ,  EVERS FRANCISCUS ,  EMPEL JAAP ,  COUMANS LEON ,  GERRITZEN JUSTIN

IPC: G03F7/20

公开(公告)号：NL2008184A

公开(公告)日：2012-08-29

申请号：NL2008184

申请日：2012-01-26

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  DEBRAUWER PIETER ,  STEEN ANTONIUS ,  KOLDEWEIJ ROBIN

IPC: G03F7/20

Abstract: A gas manifold to direct a gas flow between two parallel plates of an optical component of a lithographic apparatus, the gas manifold having an inlet to provide a gas flow to the gas manifold, a lattice comprising a plurality of through holes to homogenize the gas flow, a contractor downstream of the lattice to reduce the cross sectional area through which the gas flow flows, and an outlet downstream of the contractor to provide the gas flow to the two parallel plates.

公开(公告)号：NL2009692A

公开(公告)日：2013-06-10

申请号：NL2009692

申请日：2012-10-25

Applicant: ASML NETHERLANDS BV

Inventor： POLET THEODORUS ,  COX HENRIKUS ,  HAM RONALD ,  SIMONS WILHELMUS ,  WINKEL JIMMY ,  CORCORAN GREGORY ,  BOXTEL FRANK

IPC: G03F7/20

公开(公告)号：NL2006243A

公开(公告)日：2011-09-20

申请号：NL2006243

申请日：2011-02-18

Applicant: ASML NETHERLANDS BV ,  ASML HOLDING NV

Inventor： NET ANTONIUS ,  BOXTEL FRANK ,  PAARHUIS BART ,  LI JINGGAO ,  GOSEN JEROEN

IPC: G03F7/20 ,  G03F9/00

公开(公告)号：NL2012291A

公开(公告)日：2014-08-21

申请号：NL2012291

申请日：2014-02-19

Applicant: ASML NETHERLANDS BV ,  ASML HOLDING NV

Inventor： CUYPERS KOEN ,  ANDRADE OLIVEIRA MARCELO ,  REMIE MARINUS ,  SINGH CHATTARBIR ,  BOKHOVEN LAURENTIUS ,  VEN HENRICUS ,  FONSECA JUNIOR JOS ,  BOXTEL FRANK ,  BURBANK DANIEL ,  LOOPSTRA ERIK ,  ONVLEE JOHANNES ,  SCHUSTER MARK ,  BALLEGOIJ ROBERTUS ,  WARD CHRISTOPHER ,  WESTERLAKEN JAN

IPC: G03F7/20

公开(公告)号：NL2010916A

公开(公告)日：2014-01-07

申请号：NL2010916

申请日：2013-06-05

Applicant: ASML NETHERLANDS BV ,  ASML HOLDING NV

Inventor： WESTERLAKEN JAN STEVEN CHRISTIAAN ,  BLOKS RUUD ,  DELMASTRO PETER ,  LAURENT THIBAULT ,  LEENDERS MARTINUS ,  SCHUSTER MARK ,  WARD CHRISTOPHER ,  BOXTEL FRANK

IPC: G03F7/20

Abstract: A lithographic apparatus has a support structure configured to support a patterning device, the patterning device serving to pattern a radiation beam according to a desired pattern and having a planar main surface through which the radiation beam passes; an outlet opening configured to direct a flow of a gas onto the patterning device; and an inlet opening configured to extract the gas which has exited the outlet opening, wherein the outlet opening and inlet opening are in a facing surface facing the planar main surface of the patterning device.

公开(公告)号：NL2009591A

公开(公告)日：2013-05-23

申请号：NL2009591

申请日：2012-10-09

Applicant: ASML NETHERLANDS BV

Inventor： GOSEN JEROEN ,  NET ANTONIUS ,  HEUVEL LEONARDA ,  BOXTEL FRANK

IPC: G03F7/20

公开(公告)号：NL2007439A

公开(公告)日：2012-04-23

申请号：NL2007439

申请日：2011-09-19

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  DAM MARINUS ,  JASPER JOHANNES ,  HAM RONALD ,  SHULEPOV SERGEI ,  PIETERSE GERBEN ,  BARAGONA MARCO ,  DEBRAUWER PIETER ,  STEEN ANTONIUS

IPC: G03F7/20

Abstract: A gas manifold to direct a gas flow between two plates of an optical component of a lithographic apparatus, the gas manifold having an inlet, a diffuser downstream of the inlet, a flow straightener downstream of the inlet, a contractor downstream of the flow straightener, and an outlet downstream of the contractor.

公开(公告)号：NL2009899A

公开(公告)日：2013-06-24

申请号：NL2009899

申请日：2012-11-28

Applicant: ASML NETHERLANDS BV

Inventor： GAAG MARC ,  HEUVEL LEONARDA ,  MARTENS ARJAN ,  BOXTEL FRANK

IPC: G03F7/20

Abstract: An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve, and a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.

公开(公告)号：NL2009378A

公开(公告)日：2013-04-09

申请号：NL2009378

申请日：2012-08-29

Applicant: ASML NETHERLANDS BV

Inventor： BOXTEL FRANK ,  NET ANTONIUS ,  HEUVEL LEONARDA

IPC: G03F7/20