Patent search ap:("ASML NETHERLANDS BV") AND inv:"KOSTER NORBERTUS" Page 1

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发明专利
SYSTEM FOR CONTACTLESS CLEANING, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2003405A

公开(公告)日：2010-03-30

申请号：NL2003405

申请日：2009-08-28

Applicant: ASML NETHERLANDS BV

Inventor： SCACCABAROZZI LUIGI , BANINE VADIM , KOSTER NORBERTUS , MOORS JOHANNES , KAMPEN MAARTEN , RAJU RAMASAMY , LYTLE WAYNE MATHEW , RUZIC DAVID NEIL , NEUMANN MARTIN JOHN

IPC: B08B7/00 , G03F7/20

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