公开(公告)号：NL2011237A

公开(公告)日：2014-02-04

申请号：NL2011237

申请日：2013-07-30

Applicant: ASML NETHERLANDS BV

Inventor： BANINE VADIM ,  MINNAERT ARTHUR ,  MUITJENS MARCEL ,  YAKUNIN ANDREI ,  SCACCABAROZZI LUIGI ,  MALLMANN HANS ,  BAL KURSAT ,  LUIJTEN CARLO ,  NIENHUYS HAN-KWANG ,  HUIJBERTS ALEXANDER ,  GASSELING PAULUS ,  RIZO DIAGO PEDRO ,  KAMPEN MAARTEN ,  AERLE NICK

IPC: G03F7/20

公开(公告)号：NL2005166A

公开(公告)日：2011-03-17

申请号：NL2005166

申请日：2010-07-29

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  KAMPEN MAARTEN ,  TIMOSHKOV VADIM

IPC: G21K1/06 ,  G03F7/20

Abstract: A spectral purity filter includes a substrate, a plurality of apertures through the substrate, and a plurality of walls. The walls define the plurality of apertures through the substrate. The spectral purity filter also includes a first layer formed on the substrate to reflect radiation of a first wavelength, and a second layer formed on the first layer to prevent oxidation of the first layer. The apertures are constructed and arranged to be able to transmit at least a portion of radiation of a second wavelength therethrough.

公开(公告)号：NL2006563A

公开(公告)日：2011-05-17

申请号：NL2006563

申请日：2011-04-07

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  BANINE VADIM ,  LOOPSTRA ERIK ,  SCHOOT HARMEN ,  STEVENS LUCAS ,  KAMPEN MAARTEN

IPC: G03F7/20

公开(公告)号：NL2005699A

公开(公告)日：2011-01-06

申请号：NL2005699

申请日：2010-11-16

Applicant: ASML NETHERLANDS BV

Inventor： JAK MARTIN ,  BANINE VADIM ,  SOER WOUTER ,  YAKUNIN ANDREI ,  KAMPEN MAARTEN ,  SCHASFOORT AD

IPC: G03F7/20 ,  G21K1/06

公开(公告)号：NL2011761A

公开(公告)日：2014-01-13

申请号：NL2011761

申请日：2013-11-08

Applicant: ASML NETHERLANDS BV

Inventor： KUZNETSOV ALEXEY ,  BOOGAARD ARJEN ,  HUIJBREGTSE JEROEN ,  NIKIPELOV ANDREY ,  KAMPEN MAARTEN

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2010217A

公开(公告)日：2013-03-19

申请号：NL2010217

申请日：2013-01-31

Applicant: ASML NETHERLANDS BV

Inventor： FRANKEN JOHANNES ,  KEMPEN ANTONIUS ,  KAMPEN MAARTEN ,  MESTROM WILBERT

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2003405A

公开(公告)日：2010-03-30

申请号：NL2003405

申请日：2009-08-28

Applicant: ASML NETHERLANDS BV

Inventor： SCACCABAROZZI LUIGI ,  BANINE VADIM ,  KOSTER NORBERTUS ,  MOORS JOHANNES ,  KAMPEN MAARTEN ,  RAJU RAMASAMY ,  LYTLE WAYNE MATHEW ,  RUZIC DAVID NEIL ,  NEUMANN MARTIN JOHN

IPC: B08B7/00 ,  G03F7/20