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公开(公告)号：SG116542A1
公开(公告)日：2005-11-28
申请号：SG200402415
申请日：2004-05-06
Applicant: ASML NETHERLANDS BV
Inventor： BOB STREEFKERK , ERIK ROELOF LOOPSTRA CHRISTIAA , JOHANNES CATHARINUS HUBERTUS M , GERARDUS PETRUS MATTHIJS VAN N , KLAUS SIMON , BERNARDUS ANTONIUS SLAGHEKKE , ALEXANDER STRAAIJER , JAN-GERARD CORNELIS VAN DER TO , MARTIJN HOUKES
IPC: G03F7/20 , H01L21/027
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