公开(公告)号：WO2013160026A3

公开(公告)日：2014-07-24

申请号：PCT/EP2013055662

申请日：2013-03-19

Applicant: ASML NETHERLANDS BV

Inventor： WILKLOW RONALD ,  SCHMITZ ROGER ,  NOTENBOOM ARNOUD ,  WILL MANON ELISE

IPC: G03F7/20

CPC classification number: G03F7/70708 ,  G03F7/70875 ,  H01L21/6831

Abstract: An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion.

Abstract translation: 一种构造成保持物体的静电夹具（21），所述静电夹具包括电极（24），由位于所述电极上的电阻材料形成的电阻部分（23）和由电介质材料形成的电介质部分 位于电阻部分上。

公开(公告)号：NL2011920A

公开(公告)日：2014-07-23

申请号：NL2011920

申请日：2013-12-09

Applicant: ASML NETHERLANDS BV

Inventor： KLOMP PETRUS ,  MERTENS BASTIAAN ,  NOTENBOOM ARNOUD

IPC: G03F7/20 ,  H01L21/687

Abstract: An electrostatic clamp (12) comprising an electrode (2), a layer of resistive material (6) located on the electrode, and a layer of dielectric (8) located on the resistive material, wherein the electrostatic clamp further comprises burls (10) which project from the layer of dielectric.

公开(公告)号：NL2008609A

公开(公告)日：2012-05-24

申请号：NL2008609

申请日：2012-04-05

Applicant: ASML NETHERLANDS BV

Inventor： CORNELISSEN SEBASTIAAN ,  GILISSEN NOUD ,  SIJBEN ANKO ,  NOTENBOOM ARNOUD ,  WILK RONALD

IPC: G03F7/20 ,  H01L21/687

公开(公告)号：NL2010481A

公开(公告)日：2013-10-28

申请号：NL2010481

申请日：2013-03-19

Applicant: ASML NETHERLANDS BV

Inventor： WILK RONALD ,  SCHMITZ ROGER ,  NOTENBOOM ARNOUD ,  WILL MANON ELISE

IPC: G03F7/20 ,  H01L21/687