公开(公告)号：NL2009689A

公开(公告)日：2013-06-05

申请号：NL2009689

申请日：2012-10-24

Applicant: ASML NETHERLANDS BV

Inventor： GILISSEN NOUD ,  CUIJPERS MARTINUS ,  FIEN MENNO ,  SIJBEN ANKO ,  SMEETS MARTIN

IPC: G03F7/20 ,  H01L21/683

Abstract: A support for an object having a support surface configured to support the object; wherein the support surface includes a main part and a moveable part, the moveable part of the support surface being moveable between a retracted position in which the moveable part of the support surface is adapted to be substantially in the same plane as the main part of the support surface and an extended position in which the moveable part of the support surface protrudes from the plane of the main part of the support surface.

公开(公告)号：NL2008609A

公开(公告)日：2012-05-24

申请号：NL2008609

申请日：2012-04-05

Applicant: ASML NETHERLANDS BV

Inventor： CORNELISSEN SEBASTIAAN ,  GILISSEN NOUD ,  SIJBEN ANKO ,  NOTENBOOM ARNOUD ,  WILK RONALD

IPC: G03F7/20 ,  H01L21/687

公开(公告)号：NL2007631A

公开(公告)日：2011-11-23

申请号：NL2007631

申请日：2011-10-20

Applicant: ASML NETHERLANDS BV

Inventor： BRINKHOF EUGENE ,  BEX JAN ,  SIJBEN ANKO ,  DAMEN JOHANNES

IPC: G03F7/20 ,  H01L21/683

公开(公告)号：NL2004872A

公开(公告)日：2010-12-20

申请号：NL2004872

申请日：2010-06-11

Applicant: ASML NETHERLANDS BV

Inventor： DAMEN JOHANNES ,  SIJBEN ANKO ,  ROZENVELD JOHANNES ,  DEKKERS JEROEN-FRANK ,  BRINKHOF EUGENE ,  LANGELER HERMAN ,  GOMPEL PETER

IPC: G03F7/20