公开(公告)号：NL2009689A

公开(公告)日：2013-06-05

申请号：NL2009689

申请日：2012-10-24

Applicant: ASML NETHERLANDS BV

Inventor： GILISSEN NOUD ,  CUIJPERS MARTINUS ,  FIEN MENNO ,  SIJBEN ANKO ,  SMEETS MARTIN

IPC: G03F7/20 ,  H01L21/683

Abstract: A support for an object having a support surface configured to support the object; wherein the support surface includes a main part and a moveable part, the moveable part of the support surface being moveable between a retracted position in which the moveable part of the support surface is adapted to be substantially in the same plane as the main part of the support surface and an extended position in which the moveable part of the support surface protrudes from the plane of the main part of the support surface.

公开(公告)号：NL2008609A

公开(公告)日：2012-05-24

申请号：NL2008609

申请日：2012-04-05

Applicant: ASML NETHERLANDS BV

Inventor： CORNELISSEN SEBASTIAAN ,  GILISSEN NOUD ,  SIJBEN ANKO ,  NOTENBOOM ARNOUD ,  WILK RONALD

IPC: G03F7/20 ,  H01L21/687

公开(公告)号：NL2004153A

公开(公告)日：2010-08-25

申请号：NL2004153

申请日：2010-01-27

Applicant: ASML NETHERLANDS BV

Inventor： CADEE THEODORUS ,  GILISSEN NOUD ,  COMPEN RENE ,  KENNON JAMES

IPC: G03F7/20

公开(公告)号：NL2005244A

公开(公告)日：2011-03-23

申请号：NL2005244

申请日：2010-08-18

Applicant: ASML NETHERLANDS BV

Inventor： DONDERS SJOERD ,  GILISSEN NOUD

IPC: H01L21/683 ,  G03F7/20

Abstract: A substrate table or a patterning device support includes an aerogel. The aerogel may be very light weight, for example the aerogel may have a density between 0.5 and 500 mg/cm3, preferably between 1 and 100 mg/cm3 and most preferably between 1 and 10 mg/cm3. The aerogel may be made from a silica gel. The aerogel made from silica gel may have a density of 1.9 mg/cm3 and if the air out of the aerogel is evacuated even 1 mg/cm3.

公开(公告)号：NL2004266A

公开(公告)日：2010-10-28

申请号：NL2004266

申请日：2010-02-18

Applicant: ASML NETHERLANDS BV

Inventor： CADEE THEODORUS ,  GILISSEN NOUD ,  VERMEULEN JOHANNES

IPC: G03F7/20 ,  H01L21/68

Abstract: An actuator is disclosed that includes a body, the body having a face, and a plurality of conduits located in the body, each conduit deformable in response to a change of pressure within the conduit, the deformation of the conduit configured to cause a deformation of the face.

公开(公告)号：NL2007215A

公开(公告)日：2012-03-12

申请号：NL2007215

申请日：2011-08-03

Applicant: ASML NETHERLANDS BV

Inventor： KHUAT DUY LAURENT ,  GILISSEN NOUD

IPC: G03F7/20 ,  G03F9/00

Abstract: A self-referencing interferometer includes an optical system to split an alignment beam to create a reference beam and a transformed beam. The optical system includes a beam splitter to combine the reference beam and the transformed beam so that the diffraction orders in the reference beam spatially overlap with their respective opposite orders in the transformed beam. A detector system receives the spatially overlapping reference beam and transformed beam from the optical system and determines a position signal. The detector system includes a polarizing system for manipulating the polarization of the beams so that they interfere, and for directing the interfering reference beam and transformed beam to a detector for determining a position signal from the variation of intensity of the interfering beams.

公开(公告)号：NL2006602A

公开(公告)日：2011-06-09

申请号：NL2006602

申请日：2011-04-14

Applicant: ASML NETHERLANDS BV

Inventor： OCKWELL DAVID ,  GILISSEN NOUD

IPC: G03F7/20 ,  H01L21/683