Patent search ap:("ASML NETHERLANDS BV") AND inv:"VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS" Page 1

1.

发明专利
LITHOGRAPHIC APPARATUS COMPRISING AN ACTUATOR, AND METHOD FOR PROTECTING SUCH ACTUATOR. 未知

公开(公告)号：NL2010628A

公开(公告)日：2013-10-29

申请号：NL2010628

申请日：2013-04-12

Applicant: ASML NETHERLANDS BV

Inventor： CADEE THEODORUS PETRUS MARIA , BROERS SANDER CHRISTIAAN , HOL SVEN ANTOIN JOHAN , HUANG YANG-SHAN , GROOT ANTONIUS FRANCISCUS JOHANNES , VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS

IPC: G03F7/20 , G03F9/00

2.

发明专利
STAGE APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2012966A

公开(公告)日：2014-12-17

申请号：NL2012966

申请日：2014-06-06

Applicant: ASML NETHERLANDS BV

Inventor： HUANG YANG-SHAN , HOL SVEN ANTOIN JOHAN , VALENTIN CHRISTIAAN LOUIS , VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS , GROOT ANTONIUS FRANCISCUS JOHANNES , EIJK JAN , VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS

IPC: G03F7/20 , H01L21/68

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