公开(公告)号：AU5859501A

公开(公告)日：2001-12-11

申请号：AU5859501

申请日：2001-05-22

Applicant: AXCELIS TECH INC

Inventor： SAADATMAND KOUROSH ,  SCHERER ERNST FREDERICK

IPC: H01J37/04 ,  H01J37/317 ,  H05H7/02

Abstract: An integrated RF amplifier and resonator is provided for use with an ion accelerator. The amplifier includes an output substantially directly coupled with a resonator coil. The amplifier output may be coupled capacitively or inductively. In addition, an apparatus is provided for accelerating ions in an ion implanter. The apparatus comprises an amplifier with an RF output, a tank circuit with a coil substantially directly coupled to the RF output of the amplifier, and an electrode connected to the coil for accelerating ions. Also provided is a method for coupling an RF amplifier with a resonator in an ion accelerator. The method comprises connecting the RF output of the amplifier to a coupler, and locating the coupler proximate the coil, thereby substantially directly coupling the RF output of the amplifier with the resonator coil.

公开(公告)号：WO0193646A3

公开(公告)日：2002-03-28

申请号：PCT/GB0102274

申请日：2001-05-22

Applicant: AXCELIS TECH INC ,  EATON LTD

Inventor： DIVERGILIO WILLIAM FRANK ,  SAADATMAND KOUROSH ,  SCHERER ERNST FREDERICK

IPC: H01J37/04 ,  H01J37/317 ,  H05H7/02

CPC classification number: H05H7/02

Abstract: An integrated RF amplifier (120) and resonator (100) is provided for use with an ion accelerator. The amplifier (120) includes an output substantially directly coupled with a resonator coil (L). The amplifier output may be coupled capacitively or inductively. In addition, an apparatus is provided for accelerating ions in an ion implanter. The apparatus comprises an amplifier (120) with an RF output (122), a tank circuit (100) with a coil (L) substantially directly coupled to the RF output (122) of the amplifier (120), and an electrode (108) connected to the coil (L) for accelerating ions. Also provided is a method (500) for coupling an RF amplifier (120) with a resonator (100) in an ion accelerator. The method comprises connecting (502) the RF output (122) of the amplifier (120) to a coupler, and locating (504) the coupler proximate the coil (L), thereby substantially directly coupling the RF output (122) of the amplifier (120) with the resonator coil (L).

Abstract translation: 提供集成RF放大器（120）和谐振器（100）以与离子加速器一起使用。 放大器（120）包括基本上直接与​​谐振器线圈（L）耦合的输出。 放大器输出可以电容或电感耦合。 此外，提供了用于加速离子注入机中的离子的装置。 该装置包括具有RF输出（122）的放大器（120），具有基本上直接耦合到放大器（120）的RF输出端（122）的线圈（L）的电路（108）和电极 ）连接到线圈（L），用于加速离子。 还提供了一种用于在离子加速器中将RF放大器（120）与谐振器（100）耦合的方法（500）。 该方法包括将放大器（120）的RF输出（122）连接（502）到耦合器，并将耦合器定位（504）靠近线圈（L），从而基本上直接耦合放大器的RF输出（122） （120）与谐振器线圈（L）。

公开(公告)号：DE69914435T2

公开(公告)日：2004-11-25

申请号：DE69914435

申请日：1999-09-07

Applicant: AXCELIS TECH INC

Inventor： SCHERER ERNST FREDERICK

IPC: H01J37/317 ,  C23C14/48 ,  H01J37/30 ,  H01L21/265 ,  H05H5/08 ,  H05H7/02 ,  H05H7/22

Abstract: A resonator circuit capable of resonating at a predetermined frequency is provided. The resonator circuit comprises a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of the inductor and the capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60). A radio frequency (RF) input coupling (70) is coupled directly to the inductor (62) at the low-voltage end (66) of the resonator. A high-voltage electrode (72) is coupled to the high-voltage end (64) of the resonator. A first resonator tuning mechanism is provided for varying the inductance of the inductor, comprising a plunger (90) movable within the coil of the inductor (62) along the longitudinal axis (92). A second resonator tuning mechanism is provided for varying the capacitance of the capacitor (88, 82). The first tuning mechanism provides fine tuning of the resonator by means of varying the inductance of the inductor (62), and the second tuning mechanism provides coarse or initial tuning of the resonator by means of varying the capacitance of the capacitor (88, 82).

公开(公告)号：DE69914435D1

公开(公告)日：2004-03-04

申请号：DE69914435

申请日：1999-09-07

Applicant: AXCELIS TECH INC

Inventor： SCHERER ERNST FREDERICK

IPC: H01J37/317 ,  C23C14/48 ,  H01J37/30 ,  H01L21/265 ,  H05H5/08 ,  H05H7/02 ,  H05H7/22

Abstract: A resonator circuit capable of resonating at a predetermined frequency is provided. The resonator circuit comprises a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of the inductor and the capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60). A radio frequency (RF) input coupling (70) is coupled directly to the inductor (62) at the low-voltage end (66) of the resonator. A high-voltage electrode (72) is coupled to the high-voltage end (64) of the resonator. A first resonator tuning mechanism is provided for varying the inductance of the inductor, comprising a plunger (90) movable within the coil of the inductor (62) along the longitudinal axis (92). A second resonator tuning mechanism is provided for varying the capacitance of the capacitor (88, 82). The first tuning mechanism provides fine tuning of the resonator by means of varying the inductance of the inductor (62), and the second tuning mechanism provides coarse or initial tuning of the resonator by means of varying the capacitance of the capacitor (88, 82).

公开(公告)号：SG78388A1

公开(公告)日：2001-02-20

申请号：SG1999004236

申请日：1999-09-01

Applicant: AXCELIS TECH INC

Inventor： MCINTYRE EDWARD KIRBY JR ,  DIVERGILIO WILLIAM FRANK ,  SAADATMAND KOUROSH ,  SCHERER ERNST FREDERICK ,  SWENSON DAVID RICHARD ,  WENZEL KEVIN WAYNE

IPC: H01L21/66 ,  C23C14/48 ,  H01J37/304 ,  H01J37/317 ,  H01J49/40 ,  H01J49/44 ,  H01L21/265 ,  H01J37/244

Abstract: In accordance with the present invention, an ion implanter (10) including a time of flight energy measurement apparatus (200) for measuring and controlling the energy of an ion beam (14). The ion implanter (10) includes an ion source (12) for generating the ion beam (14), an ion acceleration assembly (18) for accelerating the beam (14) resulting in the beam (14) comprising a series of ion pulses (P0, P1, ...., P(n+1)) having a predetermined frequency (F) and beam forming and directing structure (50) for directing the ion beam (14) at workpieces (21) supported in an implantation chamber (22) of the implanter (10). The time of flight energy measurement apparatus (200) includes spaced apart first and second sensors (210, 310, 220, 320), timing circuitry (204) and conversion circuitry (206). The time of flight energy measurement apparatus (200) measures an average kinetic energy of an ion (E(ion)) included in a selected ion pulse of the ion beam. The first sensor (210, 310) and a second sensor (220, 320) are disposed adjacent the ion beam (14) and spaced a predetermined distance apart, the second sensor (220, 320) being downstream of the first sensor (210, 310). The first sensor (210, 310) generates a signal when an ion pulse of the ion beam (14) passes the first sensor (210, 310) and the second sensor (220, 320) generates a signal when an ion pulse of the ion beam (14) passes the second sensor (220, 320). The timing circuitry (204) of the energy measurement apparatus (200) is electrically coupled to the first and second sensors (210, 310, 220, 320) and determines an elapsed time, t, for the selected ion pulse to traverse the predetermined distance between the first and second sensors (210, 310, 220, 320). The timing circuitry (204) calculates an average number of ion pulses. N. in the ion beam (14) between the first and second sensors (210, 310, 220, 320) based on the approximation of the ion beam energy (E(approx.)) and calculates an offset time. t(offset). for the selected ion pulse using the formula, t(offset) = N x T. The timing circuitry (204) than determines the elapsed time, t. The conversion circuitry (206) converts the elapsed time. t. for the selected ion pulse into a measure of the energy of the ion beam (E(ion)).

公开(公告)号：NZ522808A

公开(公告)日：2004-06-25

申请号：NZ52280801

申请日：2001-05-22

Applicant: AXCELIS TECH INC

Inventor： DIVERGILIO WILLIAM FRANK ,  SAADATMAND KOUROSH ,  SCHERER ERNST FREDERICK

IPC: H01J37/04 ,  H01J37/317 ,  H05H7/02

Abstract: An integrated RF amplifier (120) and resonator (100) is provided for use with an ion accelerator. The amplifier (120) includes an output substantially directly coupled with a resonator coil (L). The amplifier output may be coupled capacitively or inductively. In addition, an apparatus is provided for accelerating ions in an ion implanter. The apparatus comprises an amplifier (120) with an RF output (122), a tank circuit (100) with a coil (L) substantially directly coupled to the RF output (122) of the amplifier (120), and an electrode (108) connected to the coil (L) for accelerating ions. Also provided is a method (500) for coupling an RF amplifier (120) with a resonator (100) in an ion accelerator. The method comprises connecting (502) the RF output (122) of the amplifier (120) to a coupler, and locating (504) the coupler proximate the coil (L), thereby substantially directly coupling the RF output (122) of the amplifier (120) with the resonator coil (L).