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1.发明专利
公开(公告)号：CA3111475A1
公开(公告)日：2020-04-02
申请号：CA3111475
申请日：2019-09-27
Applicant: BUTTERFLY NETWORK INC
Inventor： LIU JIANWEI , FIFE KEITH G , LUTSKY JOSEPH , MIAO LINGYUN
Abstract: A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
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Patent Agency Ranking2.发明专利
公开(公告)号：AU2019350989A1
公开(公告)日：2021-03-25
申请号：AU2019350989
申请日：2019-09-27
Applicant: BUTTERFLY NETWORK INC
Inventor： LIU JIANWEI , FIFE KEITH G , LUTSKY JOSEPH , MIAO LINGYUN
Abstract: A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
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公开(公告)号：CA3118563A1
公开(公告)日：2020-05-22
申请号：CA3118563
申请日：2019-11-12
Applicant: BUTTERFLY NETWORK INC
Inventor： FIFE KEITH G , MIAO LINGYUN , LIU JIANWEI , ROTHBERG JONATHAN M
Abstract: A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.
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公开(公告)号：CA3119753A1
公开(公告)日：2020-05-22
申请号：CA3119753
申请日：2019-11-14
Applicant: BUTTERFLY NETWORK INC
Inventor： MIAO LINGYUN , FIFE KEITH G , LIU JIANWEI , ROTHBERG JONATHAN M
IPC: G01N29/22 , G01N29/24 , G01N29/34 , H04R15/02 , H04R19/01 , H04R19/02 , H04R19/04 , H04R19/06 , H04R19/08 , H04R19/10
Abstract: A method of forming an ultrasonic transducer device includes forming an insulating layer having topographic features over a lower transducer electrode layer of a substrate; forming a conformal, anti-stiction layer over the insulating layer such that the conformal layer also has the topographic features; defining a cavity in a support layer formed over the anti-stiction layer; and bonding a membrane to the support layer.
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公开(公告)号：AU2019378878A1
公开(公告)日：2021-06-03
申请号：AU2019378878
申请日：2019-11-14
Applicant: BUTTERFLY NETWORK INC
Inventor： MIAO LINGYUN , FIFE KEITH G , LIU JIANWEI , ROTHBERG JONATHAN M
IPC: G01N29/22 , G01N29/24 , G01N29/34 , H04R15/02 , H04R19/01 , H04R19/02 , H04R19/04 , H04R19/06 , H04R19/08 , H04R19/10
Abstract: A method of forming an ultrasonic transducer device includes forming an insulating layer having topographic features over a lower transducer electrode layer of a substrate; forming a conformal, anti-stiction layer over the insulating layer such that the conformal layer also has the topographic features; defining a cavity in a support layer formed over the anti-stiction layer; and bonding a membrane to the support layer.
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公开(公告)号：AU2019379545A1
公开(公告)日：2021-05-27
申请号：AU2019379545
申请日：2019-11-12
Applicant: BUTTERFLY NETWORK INC
Inventor： FIFE KEITH G , MIAO LINGYUN , LIU JIANWEI , ROTHBERG JONATHAN M
Abstract: A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.
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