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公开(公告)号：JP2006177971A
公开(公告)日：2006-07-06
申请号：JP2006005111
申请日：2006-01-12
Inventor： GLEASON K REED , SMITH KENNETH A , BAYNE MIKE
CPC classification number: G01R1/06711 , G01R1/07342 , G01R1/0735
Abstract: PROBLEM TO BE SOLVED: To surely attain sufficient scrubbing pressure and reliable tilting and returning effect of each contact in a membrane probing assembly.
SOLUTION: The membrane probing assembly 42 includes a membrane assembly 72 having a central region 80 interconnected to a support 54 by an elastomeric layer 98. Flexible traces form data/signal lines 76 to contacts 88 on the central region 80. Each contact 88 comprises a rigid beam 90 and a bump 92 located in off-centered location on the beam 90, which bump 92 includes a contacting portion 93. After initial touchdown of these contacting portions 93, further overtravel of pads 100 causes each beam 90 to independently tilt locally so that different portions of each beam 90 move different distances relative to the support 54 thus driving each contact into lateral scrubbing movement across the pads 100.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：确保在膜探测组件中获得足够的洗涤压力和可靠的倾斜和每个接触的返回效果。 解决方案：膜探测组件42包括膜组件72，膜组件72具有通过弹性体层98互连到支撑件54的中心区域80.柔性迹线将数据/信号线76形成到中心区域80上的触点88。 88包括刚性梁90和位于梁90上的偏心位置的凸起92，凸起92包括接触部分93.在这些接触部分93初始接触之后，垫100的进一步超行使每个梁90独立地 每个梁90的不同部分相对于支撑件54移动不同的距离，从而将每个接触件驱动穿过垫片100进行横向擦洗运动。版权所有：（C）2006，JPO＆NCIPI
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Patent Agency Ranking
公开(公告)号：AU3007797A
公开(公告)日：1998-03-06
申请号：AU3007797
申请日：1997-05-02
Applicant: CASCADE MICROTECH INC
Inventor： GLEASON K REED , SMITH KENNETH A , BAYNE MIKE
Abstract: A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.
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公开(公告)号：AT254289T
公开(公告)日：2003-11-15
申请号：AT97924735
申请日：1997-05-02
Applicant: CASCADE MICROTECH INC
Inventor： GLEASON K REED , SMITH KENNETH A , BAYNE MIKE
Abstract: A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.
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公开(公告)号：EP1210208A4
公开(公告)日：2005-07-06
申请号：EP99937404
申请日：1999-07-21
Applicant: CASCADE MICROTECH INC
Inventor： REED GLEASON K , SMITH KENNETH A , BAYNE MICHAEL A , LESHER TIMOTHY , KOXXY MARTIN
CPC classification number: G01R1/06744 , G01R1/0735 , G01R3/00
Abstract: A substrate (200), preferably constructed of a ductile material and a tool (210) having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression (216) can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
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公开(公告)号：ES2210530T3
公开(公告)日：2004-07-01
申请号：ES97924735
申请日：1997-05-02
Applicant: CASCADE MICROTECH INC
Inventor： GLEASON K REED , SMITH KENNETH A , BAYNE MIKE
Abstract: A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.
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公开(公告)号：AU5224499A
公开(公告)日：2001-02-13
申请号：AU5224499
申请日：1999-07-21
Applicant: CASCADE MICROTECH INC
Inventor： REED GLEASON K , SMITH KENNETH A , BAYNE MICHAEL A , LESHER TIMOTHY , KOXXY MARTIN
Abstract: A substrate (200), preferably constructed of a ductile material and a tool (210) having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression (216) can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
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