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    COMPACT SOURCE HAVING X RAY BEAM OF VERY HIGH BRILLIANCE
    1.
    发明公开
    COMPACT SOURCE HAVING X RAY BEAM OF VERY HIGH BRILLIANCE 审中-公开
    具有非常高亮度的X射线的紧凑光源

    公开(公告)号：KR20070073605A

    公开(公告)日：2007-07-10

    申请号：KR20070000033

    申请日：2007-01-02

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  BARTHOD BENOIT

    IPC: H01J35/10 ,  H01J35/24 ,  H05G1/02 ,  H05G1/26

    CPC classification number: F04D19/042 ,  H01J35/103 ,  H01J35/106 ,  H01J35/14 ,  H01J35/20 ,  H01J35/26

    Abstract: A compact source having an X-ray beam of very high brilliance is provided to lengthen a life time of a rotary anode within an X-ray source. A vacuum container(7) is defined by a sealing wall. A vacuum pump(1) includes a stator(1b) installed within an outer sealing casing(1f), a rotor(1a), and rotor controllers(10a-10e) and is connected to the vacuum container in order to form a vacuum state of the vacuum container. A cathode(3) is formed to generate lines of electric force within the vacuum container. A rotary anode(2) is rotated around a rotary shaft within the vacuum container. An edge(2a) of the rotary anode receives the lines of electric force from the cathode in order to radiate an X-ray to an outlet(11). The rotary anode is connected to the rotor and is disposed in the same axis as the axis of the rotor. The sealing casing is used for forming the sealing wall of the vacuum container. One or more cooling elements(8,9) are fixed to the stator or the outer sealing casing facing main radiative surfaces(2b,2c) of the rotary anode.

    Abstract translation: 提供具有非常高亮度的X射线束的致密源，以延长X射线源内旋转阳极的使用寿命。 真空容器（7）由密封壁限定。 真空泵（1）包括安装在外部密封壳体（1f）内的定子（1b），转子（1a）和转子控制器（10a-10e），并且与真空容器连接以形成真空状态 的真空容器。 阴极（3）形成为在真空容器内产生电力线。 旋转阳极（2）围绕真空容器内的旋转轴旋转。 旋转阳极的边缘（2a）从阴极接收电力线，以便将X射线辐射到出口（11）。 旋转阳极连接到转子并且设置在与转子的轴线相同的轴线上。 密封壳体用于形成真空容器的密封壁。 一个或多个冷却元件（8,9）固定到面向旋转阳极的主辐射表面（2b，2c）的定子或外部密封壳体。

    Mini-environment control system and method
    2.
    发明授权
    Mini-environment control system and method 失效
    迷你环境控制系统及方法

    公开(公告)号：US6422823B2

    公开(公告)日：2002-07-23

    申请号：US72977900

    申请日：2000-12-06

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  CHEVALIER ERIC

    IPC: B65G49/00 ,  F04B19/00 ,  H01L21/66 ,  H01L21/673 ,  F04B49/00 ,  H01L21/302

    CPC classification number: H01L21/67393 ,  F04B19/006

    Abstract: A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.

    Abstract translation: 微型环境控制装置包括一个独立的外壳，用于容纳样品并将其与外部环境隔离。 连接到各个外壳的一组微型泵产生并维持在单个外壳中的受控真空。 转移装置将样品引入单个外壳并从中提取。 微泵阵列的微泵可以是采用热蒸腾作用的类型。 温度和压力微传感器和气体分析仪使得微型阵列的操作能够由机载微型计算机控制。 因此控制样品周围的气氛。

    4.
    发明专利
    未知

    公开(公告)号：FR2839331B1

    公开(公告)日：2004-07-16

    申请号：FR0205515

    申请日：2002-05-02

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND

    IPC: F24F7/06 ,  H01L21/00 ,  E04F15/024 ,  E04B5/43

    Abstract: A suction unit (6) provided in a lower story (6), sucks air from a clean room (1), passing through passages (7) of false floor metal plate (2) towards an intermediate space (2c) and the openings (8) of a support slab (3). A vacuum generator (4) is provided in the intermediate space and above the support slab.

    6.
    发明专利
    未知

    公开(公告)号：FR2839331A1

    公开(公告)日：2003-11-07

    申请号：FR0205515

    申请日：2002-05-02

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND

    IPC: F24F7/06 ,  H01L21/00 ,  E04F15/024 ,  E04B5/43

    Abstract: A suction unit (6) provided in a lower story (6), sucks air from a clean room (1), passing through passages (7) of false floor metal plate (2) towards an intermediate space (2c) and the openings (8) of a support slab (3). A vacuum generator (4) is provided in the intermediate space and above the support slab.

    7.
    发明专利
    未知

    公开(公告)号：FR2808098B1

    公开(公告)日：2002-07-19

    申请号：FR0005094

    申请日：2000-04-20

    Applicant: CIT ALCATEL

    Inventor： BERNARD ROLAND ,  CHEVALIER VERONIQUE ,  SOGAN GLORIA

    IPC: C23C16/44 ,  G05D16/20 ,  G05D27/02 ,  H01L21/00 ,  H01L21/205 ,  G05D27/00 ,  H01L21/306 ,  B01J15/00

    Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

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