公开(公告)号：DE60120064T2

公开(公告)日：2006-12-21

申请号：DE60120064

申请日：2001-04-20

Applicant: CIT ALCATEL

Inventor： BERNARD ROLAND ,  CHEVALIER ERIC ,  SOGAN GLORIA

IPC: G05D27/02 ,  C23C16/44 ,  G05D16/20 ,  H01L21/00 ,  H01L21/205

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

公开(公告)号：FR2866956A1

公开(公告)日：2005-09-02

申请号：FR0450353

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/73 ,  G01N33/00 ,  G01N21/71

Abstract: The method involves retaining characteristic lines of major and easily excitable gaseous species e.g. nitrogen, in an original optical spectrum of radiation emitted by a plasma (4). Amplitude of the major species is sensitive to presence of minor and hardly excitable species e.g. humidity. Information over concentration of the minor species is deducted from the amplitude of the lines. An independent claim is also included for a device of detecting minor and hardly excitable gaseous species.

公开(公告)号：FR2866954A1

公开(公告)日：2005-09-02

申请号：FR0450354

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01J3/443 ,  G01N21/68 ,  G01N21/71

公开(公告)号：FR2840232A1

公开(公告)日：2003-12-05

申请号：FR0206642

申请日：2002-05-30

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  SOGAN GLORIA ,  MUNARI SEBASTIEN ,  VERAN EMMANUELLE

IPC: B01D8/00 ,  F04B37/08

Abstract: The cryogenic trap of the invention comprises, in a hollow body ( 3 ) having an access valve ( 2 ) and an outlet valve ( 6 ), a cold core ( 11 ) associated with a plate ( 13 ) having low thermal inertia and movable between a trapping position in contact with the cold core ( 11 ), and a regeneration position spaced apart from the cold core ( 11 ) and in contact with a heater ring ( 14 ). The plate ( 13 ) is in contact with gases to be trapped, and prevents them from passing to the cold core ( 11 ). Regeneration requires heating only of the plate ( 13 ) carrying the condensed and solidified gases, and it is therefore more rapid.

公开(公告)号：FR2866956B1

公开(公告)日：2006-05-19

申请号：FR0450353

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01N33/00 ,  G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/71 ,  G01N21/73

Abstract: The method involves retaining characteristic lines of major and easily excitable gaseous species e.g. nitrogen, in an original optical spectrum of radiation emitted by a plasma (4). Amplitude of the major species is sensitive to presence of minor and hardly excitable species e.g. humidity. Information over concentration of the minor species is deducted from the amplitude of the lines. An independent claim is also included for a device of detecting minor and hardly excitable gaseous species.

公开(公告)号：FR2808098B1

公开(公告)日：2002-07-19

申请号：FR0005094

申请日：2000-04-20

Applicant: CIT ALCATEL

Inventor： BERNARD ROLAND ,  CHEVALIER VERONIQUE ,  SOGAN GLORIA

IPC: C23C16/44 ,  G05D16/20 ,  G05D27/02 ,  H01L21/00 ,  H01L21/205 ,  G05D27/00 ,  H01L21/306 ,  B01J15/00

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

公开(公告)号：FR2840232B1

公开(公告)日：2004-08-27

申请号：FR0206642

申请日：2002-05-30

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  SOGAN GLORIA ,  MUNARI SEBASTIEN ,  VERAN EMMANUELLE

IPC: B01D8/00 ,  F04B37/08

Abstract: The cryogenic trap of the invention comprises, in a hollow body ( 3 ) having an access valve ( 2 ) and an outlet valve ( 6 ), a cold core ( 11 ) associated with a plate ( 13 ) having low thermal inertia and movable between a trapping position in contact with the cold core ( 11 ), and a regeneration position spaced apart from the cold core ( 11 ) and in contact with a heater ring ( 14 ). The plate ( 13 ) is in contact with gases to be trapped, and prevents them from passing to the cold core ( 11 ). Regeneration requires heating only of the plate ( 13 ) carrying the condensed and solidified gases, and it is therefore more rapid.

公开(公告)号：FR2866954B1

公开(公告)日：2006-07-14

申请号：FR0450354

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01J3/443 ,  G01N21/71 ,  G01N21/68

公开(公告)号：AT328310T

公开(公告)日：2006-06-15

申请号：AT01928019

申请日：2001-04-20

Applicant: CIT ALCATEL

Inventor： BERNARD ROLAND ,  CHEVALIER ERIC ,  SOGAN GLORIA

IPC: C23C16/44 ,  G05D16/20 ,  G05D27/02 ,  H01L21/00 ,  H01L21/205

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

公开(公告)号：FR2808098A1

公开(公告)日：2001-10-26

申请号：FR0005094

申请日：2000-04-20

Applicant: CIT ALCATEL

Inventor： BERNARD ROLAND ,  CHEVALIER VERONIQUE ,  SOGAN GLORIA

IPC: C23C16/44 ,  G05D16/20 ,  G05D27/02 ,  H01L21/00 ,  H01L21/205 ,  G05D27/00 ,  H01L21/306 ,  B01J15/00

Abstract: Pumping rate of gas from a substrate treatment process chamber is adjusted to maintain a pressure matched to each treatment stage in the processing chamber. Gas drawn upstream of a primary pump is analyzed, and the result is used to adjust the pumping rate as a function of pumped gas. Conditioning the atmosphere in a process chamber (1) for treatment of a substrate comprises: pumping the gas from the process chamber using a primary pump (3) connected to at least one upstream secondary pump; adjusting pumping speed to maintain pressure matched to each treatment stage in the process chamber; analyzing gas aspired upstream of the primary pump; and using the result of this analysis to adjust pumping speed as a function of the gas pumped, to determine evolution of the pressure in the process chamber during treatment phases. An Independent claim is included for a device for conditioning the atmosphere in a process chamber.