公开(公告)号：WO2006032335A8

公开(公告)日：2006-05-18

申请号：PCT/EP2005008964

申请日：2005-08-18

Applicant: EPCOS AG ,  HAUSER MARKUS ,  KNAUER ULRICH ,  LEIDL ANTON ,  RIHA EVELYN ,  RIHA GERD ,  ROESLER ULRIKE ,  RUILE WERNER ,  RUPPEL CLEMENS ,  SCHOLL GERD ,  WOLFF ULRICH

Inventor： HAUSER MARKUS ,  KNAUER ULRICH ,  LEIDL ANTON ,  RIHA EVELYN ,  RIHA GERD ,  ROESLER ULRIKE ,  RUILE WERNER ,  RUPPEL CLEMENS ,  SCHOLL GERD ,  WOLFF ULRICH

IPC: H03H3/10 ,  H03H9/02 ,  H03H9/08

CPC classification number: H03H9/08 ,  H03H3/10 ,  H03H9/02574 ,  H03H9/02834 ,  H03H9/02984

Abstract: The invention relates to a component which functions with the aid of acoustic waves, and which combines various measures in order to lower the temperature path, in particular the resonance frequency. Said component comprises a piezoelectric substrate (PS) having a relatively thin thickness (dp) in the region of 5 50 times the wave length capable of expanding in the material. Electrically conductive component structures (BES) are provided on the top surface and on the lower side, a compensation layer (Ks) is mechanically connected to the substrate such that mechanical deformation occurs, or that a deformation is produced in the event of a change in temperature. A Si0 2 layer having a thickness of 5 20 % of the acoustic waves capable of expanding therein is arranged over the component structures (BES).

Abstract translation: 所以建议利用声波工作，它结合了各种措施，以降低在特定的谐振频率的温度响应。 该装置包括具有从5至50倍，在材料的波长中传播的范围内的相对小的厚度（DP）的压电基片（PS）。 在顶部导电部件结构是设置在底机械牢固地与基板，补偿层（KS）连接，该机械应力被创建，或当温度变化时，一个应力积聚（BES）。 关于组件结构（BES）在其繁殖轴的厚度的声学的5〜20％由SiO _{2 布置层。}

公开(公告)号：WO2007059740A2

公开(公告)日：2007-05-31

申请号：PCT/DE2006002029

申请日：2006-11-20

Applicant: EPCOS AG ,  RUILE WERNER ,  ROESLER ULRIKE

Inventor： RUILE WERNER ,  ROESLER ULRIKE

IPC: H03H9/02 ,  H03H3/02

CPC classification number: H03H9/0222 ,  H03H3/02

Abstract: The invention relates to an electroacoustic component comprising two substrates between which a layer system is arranged, said layer system comprising a metallic layer and a layer of low acoustic impedance Z a,2 . Said metallic layer comprises a layer with a high acoustic impedance Z a,1 for which the following holds good: Z a,1 / Z a,2 = 4,5. In this way, a sufficient acoustic reflection for guided acoustic volume waves is ensured. The invention also relates to an electroacoustic component comprising a piezoelectric substrate consisting of lithium tantalate and having an angle of intersection of f rot YX, for which the following holds good: 7°

Abstract translation: 提供了一种具有两个基板的电装置，在它们之间的层系统被布置具有金属层和低的声阻抗Z _{A，2 的层，其中所述金属层是具有高的声阻抗Z的层 A，1 ，并且其中适用以下位：Z A，1 / Z A，2 = 4.5。 因此，用于引导声波足够声反射得到保证。 此外，电组件被指示给我具有交点F红YX的角度钽酸锂的压电基片，满足7°}

公开(公告)号：DE102011119660A1

公开(公告)日：2013-05-29

申请号：DE102011119660

申请日：2011-11-29

Applicant: EPCOS AG

Inventor： JAEGER PHILIPP MICHAEL ,  ROESLER ULRIKE ,  HAUSER MARKUS ,  RUILE WERNER ,  HONAL MATTHIAS

IPC: H03H9/25 ,  H03H3/08

Abstract: Es wird ein mikroakustisches Bauelement mit einem Wellenleiter vorgeschlagen, der als Wellenleiterschicht eine Glasschicht aufweist, die ein Material mit anormalem thermomechanischen Verhalten umfasst. In einem Ausführungsbeispiel wird mit einem germaniumoxidhaltigen Glas die Wellenleitung verbessert und der TCF des Bauelements kompensiert.

公开(公告)号：DE102007012384A1

公开(公告)日：2008-09-18

申请号：DE102007012384

申请日：2007-03-14

Applicant: EPCOS AG

Inventor： RUILE WERNER ,  ROESLER ULRIKE ,  HAUSER MARKUS

IPC: H03H9/17

Abstract: The component has a wave-guiding layer system (10) including a piezoelectric layer (1), a dielectric layer (21), another dielectric layer (22) surrounding on the layer (21), and an electrically conductive layer enclosed between the piezoelectric layer and the layer (21). The dielectric layers containing silicon dioxide exhibit a material with a same chemical composition, and an acoustic performance of the layer (21) is higher than that of the layer (22). The system is firmly connected with a cover layer. The layer (22) is arranged between the layer (21) and the cover layer. An independent claim is also included for a method for manufacturing a guided bulk acoustic wave operating component.

公开(公告)号：DE102006019961A1

公开(公告)日：2007-10-31

申请号：DE102006019961

申请日：2006-04-28

Applicant: EPCOS AG

Inventor： KONOPKA JAROSLAW ,  RUILE WERNER ,  ROESLER ULRIKE

IPC: H03H9/15

Abstract: The component has a metal layer arranged between a substrate and an intermediate layer, where the substrate is made of monocrystal lithium tantalate. The intermediate layer is arranged between the metal layer and another substrate. A crystal cut of the monocrystal-lithium tantalate is selected for three critical angles such as lamda, mu and theta, where lamda corresponds to 0 degree.

公开(公告)号：DE19849782B4

公开(公告)日：2004-09-30

申请号：DE19849782

申请日：1998-10-28

Applicant: EPCOS AG

Inventor： BAUER THOMAS ,  KOVACS GUENTER ,  ROESLER ULRIKE ,  RUILE WERNER

IPC: H03H9/02 ,  H03H9/145 ,  H03H9/64

Abstract: The arrangement has a piezoelectric substrate, first and second surface wave structures (St1,St2) arranged on the substrate in series in the direction of propagation of the surface waves and consisting of metal fingers with a first and second finger period (p). The finger period varies continuously in the transition region between the structures and is smaller in the transition region than in the adjacent structures.

公开(公告)号：DE102008033704A1

公开(公告)日：2010-02-04

申请号：DE102008033704

申请日：2008-07-18

Applicant: EPCOS AG

Inventor： ROESLER ULRIKE ,  HAUSER MARKUS

IPC: H03H9/145 ,  H01L41/047 ,  H03H9/25

公开(公告)号：DE112006002542A5

公开(公告)日：2008-06-26

申请号：DE112006002542

申请日：2006-11-20

Applicant: EPCOS AG

Inventor： RUILE WERNER ,  ROESLER ULRIKE

IPC: H03H9/02 ,  H03H3/02

Abstract: The component has a piezoelectric substrate (1) and a broad thicker substrate (2), where a layer system (3) is arranged between the substrates (1, 2) and includes a metal layer and a dielectric layer (32). The dielectric layer has relatively low acoustic impedance, and the metal layer has a partial layer with relatively high acoustic impedance, where a ratio between the acoustic impedances is greater than or equal to 4.5. An independent claim is also included for a method for producing a guided bulk acoustic wave (GBAW) operated component.

公开(公告)号：DE102005055871A1

公开(公告)日：2007-05-24

申请号：DE102005055871

申请日：2005-11-23

Applicant: EPCOS AG

Inventor： RUILE WERNER ,  ROESLER ULRIKE

IPC: H03H9/15

Abstract: The component has a piezoelectric substrate (1) and a broad thicker substrate (2), where a layer system (3) is arranged between the substrates (1, 2) and includes a metal layer and a dielectric layer (32). The dielectric layer has relatively low acoustic impedance, and the metal layer has a partial layer with relatively high acoustic impedance, where a ratio between the acoustic impedances is greater than or equal to 4.5. An independent claim is also included for a method for producing a guided bulk acoustic wave (GBAW) operated component.

公开(公告)号：DE59913935D1

公开(公告)日：2006-11-30

申请号：DE59913935

申请日：1999-03-22

Applicant: EPCOS AG

Inventor： ALI-HACKL MARKUS ,  FREISLEBEN STEFAN ,  JOHANNES THOMAS ,  BAIER THOMAS ,  BAUERNSCHMITT ULRICH ,  ROESLER ULRIKE

IPC: H03H9/145 ,  H03H9/64 ,  H03H9/00 ,  H03H9/02

Abstract: A surface acoustic wave filter having compensated capacitive and inductive crosstalk between adjacent IDT input and output transducers includes electromagnetically coupled transducers split into partial transducers. The routing of the partial transducer pads is modified such that the flux directions of the magnetic couplings between the adjacent partial transducers are oppositely directed so that the total induced magnetic flux is zero. The partial transducers are connected in series or in parallel such that, in the case of symmetric operation, the crosstalk capacitances between adjacent pads and transducer surfaces are balanced at the corresponding port.