公开(公告)号：EP1123558A1

公开(公告)日：2001-08-16

申请号：EP00949445.1

申请日：2000-08-02

Applicant: FEI COMPANY

Inventor： MCGINN, James, B. ,  DEN HARTOG, Sander, G. ,  JUN, David, S. ,  MAGERA, Gerald, G. ,  SCHWIND, Gregory, A.

IPC: H01J1/144 ,  H01J1/15 ,  H01J1/30

CPC classification number: H01J1/28 ,  H01J1/14 ,  H01J2237/06316 ,  H01J2237/28

Abstract: A electron emission cathode includes an emitter (102) having an apex (118) from which electrons are emitted. The emitter is attached to a heating filament (114) at a junction (116) and extends from the junction both forward toward the apex and rearward. A reservoir (130) of material that lowers the work function of the emitter is positioned on the rearward extending portion (128) of the emitter. By positioning the reservoir on the rearward extending portion, the reservoir can be positioned sufficiently far from the junction to reduce its temperature and thereby greatly increase the useful life of the emitter without adversely affecting the emission characteristics of the source.

公开(公告)号：EP1256123A2

公开(公告)日：2002-11-13

申请号：EP01987941.0

申请日：2001-10-17

Applicant: FEI COMPANY

Inventor： MAGERA, Gerald, G. ,  SCHWIND, Gregory, A. ,  MCGINN, James, B.

IPC: H01J1/15

CPC classification number: H01J37/073 ,  H01J1/15 ,  H01J1/304 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.

公开(公告)号：EP1256123B1

公开(公告)日：2009-06-10

申请号：EP01987941.0

申请日：2001-10-17

Applicant: FEI COMPANY

Inventor： MAGERA, Gerald, G. ,  SCHWIND, Gregory, A. ,  MCGINN, James, B. ,  JUN, David

IPC: H01J1/15

CPC classification number: H01J37/073 ,  H01J1/15 ,  H01J1/304 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.

Abstract translation: 低输入功率消耗紧凑的热场发射器适用于电子束系统，特别是那些使用电子束阵列或微型电子束系统的系统。 热场发射器设计通过减少对基座的热传递来减少热损失。 为了实现减少的损失，设计结合使用高电阻率，低导热性材料用于构造细丝柱和细丝。 这种材料进一步减少热损失并降低输入电流要求。 在一个实施例中，底座包括减小灯丝柱和基座之间的热传导路径并使接触区域从灯丝进一步移动的沉孔。

公开(公告)号：EP1123558B1

公开(公告)日：2004-01-21

申请号：EP00949445.1

申请日：2000-08-02

Applicant: FEI COMPANY

Inventor： MCGINN, James, B. ,  DEN HARTOG, Sander, G. ,  JUN, David, S. ,  MAGERA, Gerald, G. ,  SCHWIND, Gregory, A.

IPC: H01J1/144 ,  H01J1/15 ,  H01J1/30

CPC classification number: H01J1/28 ,  H01J1/14 ,  H01J2237/06316 ,  H01J2237/28

Abstract: A electron emission cathode includes an emitter (102) having an apex (118) from which electrons are emitted. The emitter is attached to a heating filament (114) at a junction (116) and extends from the junction both forward toward the apex and rearward. A reservoir (130) of material that lowers the work function of the emitter is positioned on the rearward extending portion (128) of the emitter. By positioning the reservoir on the rearward extending portion, the reservoir can be positioned sufficiently far from the junction to reduce its temperature and thereby greatly increase the useful life of the emitter without adversely affecting the emission characteristics of the source.