公开(公告)号：EP1388883B1

公开(公告)日：2013-06-05

申请号：EP03077444.2

申请日：2003-08-05

Applicant: FEI COMPANY

Inventor： Gerlach, Robert L. ,  Utlaut, Mark W. ,  Scheinfein, Michael R.

IPC: H01J37/12 ,  H01J37/28 ,  H01J37/305

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/12 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31749

公开(公告)号：EP1783811A2

公开(公告)日：2007-05-09

申请号：EP05111064.1

申请日：2005-11-22

Applicant: FEI COMPANY

Inventor： Henstra, Alexander ,  Scheinfein, Michael R.

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

Abstract translation: 本发明描述了用于校正像在SEM或TEM中使用的粒子透镜中的色差的校正器。 为了降低对这种校正器的电源的稳定性要求，粒子束通过校正器的能量低于光束通过透镜的能量，以被校正。

公开(公告)号：EP1388883A2

公开(公告)日：2004-02-11

申请号：EP03077444.2

申请日：2003-08-05

Applicant: FEI Company

Inventor： Gerlach, Robert L. ,  Utlaut, Mark W. ,  Scheinfein, Michael R.

IPC: H01J37/305 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/12 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance.

Abstract translation: 包括同轴聚焦离子束和电子束的系统允许使用由电子束形成的图像的FIB进行精确的处理。 在一个实施例中，偏转器将电子束偏转到离子束的轴上，并将通过最终透镜收集的二次粒子偏转到检测器。 在一个实施例中，正偏置的最终静电透镜使用相同的电压聚焦两个光束，以允许同时或交替的FIB和SEM操作。 在一个实施例中，可以改变电子的着陆能量而不改变工作距离。

公开(公告)号：EP1783811A3

公开(公告)日：2008-02-27

申请号：EP05111064.1

申请日：2005-11-22

Applicant: FEI COMPANY

Inventor： Henstra, Alexander ,  Scheinfein, Michael R.

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

公开(公告)号：EP1388883A3

公开(公告)日：2004-10-20

申请号：EP03077444.2

申请日：2003-08-05

Applicant: FEI Company

Inventor： Gerlach, Robert L. ,  Utlaut, Mark W. ,  Scheinfein, Michael R.

IPC: H01J37/305 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/12 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance.

Abstract translation: 包括同轴聚焦离子束和电子束的系统允许使用由电子束形成的图像对FIB进行精确处理。 在一个实施例中，偏转器将电子束偏转到离子束的轴上并且将通过最终透镜收集的二次粒子偏转向检测器。 在一个实施例中，正偏置的最终静电透镜使用相同的电压来聚焦两个光束以允许同时或交替的FIB和SEM操作。 在一个实施例中，电子的着陆能量可以改变而不改变工作距离。