4.
    发明专利
    未知

    公开(公告)号:AT480799T

    公开(公告)日:2010-09-15

    申请号:AT04007652

    申请日:2004-03-30

    Applicant: FUJIFILM CORP

    Abstract: A positive resist composition comprising (a) a resin that is decomposed by the action of an acid to increase solubility in an alkali developing solution, contains a structural unit having a group represented by formula (X) defined in the specification, has a weight average molecular weight of not more than 5,000, and contains an acid decomposable group in an amount of not more than 40% based on the sum total of a number of the acid decomposable group and a number of an alkali-soluble group not protected with the acid decomposable group, and (b) a compound that generates an acid upon irradiation of an actinic ray or radiation.

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