公开(公告)号：EP2252915A4

公开(公告)日：2012-10-17

申请号：EP09720706

申请日：2009-03-13

Applicant: FUJIFILM CORP

Inventor： MIZUTANI KAZUYOSHI ,  YOKOYAMA JIRO ,  SUGIYAMA SHINICHI

IPC: G03F7/004 ,  C08F12/04 ,  C08F20/10 ,  G03F7/039 ,  H01L21/027

CPC classification number: G03F7/0045 ,  C08F8/12 ,  C08F12/24 ,  C09D125/14 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  C08F212/14 ,  C08F2220/1825

公开(公告)号：EP2260352A4

公开(公告)日：2011-11-23

申请号：EP09727087

申请日：2009-03-31

Applicant: FUJIFILM CORP

Inventor： FUJII KANA ,  TOMIGA TAKAMITSU ,  TSUCHIHASHI TORU ,  MIZUTANI KAZUYOSHI ,  YOKOYAMA JIRO ,  SUGIYAMA SHINICHI ,  HIRANO SHUJI ,  FUJIMORI TORU

IPC: G03F7/039 ,  C08F212/14 ,  C08F220/10 ,  G03F7/004 ,  H01L21/027

CPC classification number: G03F7/0392 ,  C08F8/12 ,  C08F12/22 ,  C08F214/18 ,  C08F220/18 ,  C08F220/22 ,  C08F220/32 ,  C08F2220/282 ,  C08K5/375 ,  C08K5/42 ,  C08L33/068 ,  C08L51/04 ,  C08L67/02 ,  C09D125/14 ,  C09D125/18 ,  G03F7/0045 ,  G03F7/0046 ,  C08F212/14 ,  C08F2220/1825 ,  C08F2220/185 ,  C08F220/14

Abstract: According to one embodiment, an actinic ray-sensitive or radiation-sensitive resin composition includes (A) a resin containing the repeating units of formulae (I), (II) and (III) that when acted on by an acid, becomes soluble in an alkali developer, and (B) a compound that when irradiated with actinic rays or radiation, generates a fluorine-containing acid, wherein each of R1 independently represents a hydrogen atom or an optionally substituted methyl group, R2 represents a halogen atom, an optionally substituted alkyl group, an optionally substituted cycloalkyl group, an optionally substituted aryl group or an optionally substituted aralkyl group, and n is an integer of 0 to 5, provided that when n is 2 or greater, multiple R2s may be identical to or different from each other.

公开(公告)号：EP2177952A4

公开(公告)日：2011-05-04

申请号：EP08792125

申请日：2008-08-01

Applicant: FUJIFILM CORP

Inventor： TSUCHIHASHI TORU ,  MIZUTANI KAZUYOSHI ,  HIRANO SHUJI ,  YOKOYAMA JIRO ,  SUGIYAMA SHINICHI

IPC: G03F7/039 ,  C08F212/14 ,  C08F220/10 ,  H01L21/027

CPC classification number: G03F7/0397 ,  C08F8/12 ,  C08F12/22 ,  C08F12/24 ,  C08F212/14 ,  C08F2800/10 ,  G03F7/0045 ,  G03F7/0392 ,  Y10S430/114 ,  Y10S430/146 ,  C08F220/18 ,  C08F2220/1825 ,  C08F220/14