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公开(公告)号:DE3171252D1
公开(公告)日:1985-08-08
申请号:DE3171252
申请日:1981-10-29
Applicant: IBM
Inventor: BARTHOLOMEW ROBERT FORBELL , GARBARINO PAUL LOUIS , GARDINER JAMES ROBERT , REVITZ MARTIN , SHEPARD JOSEPH FRANCIS
IPC: H01L21/28 , H01L21/285 , H01L29/78 , H01L21/60