METHOD OF MAKING COMPLEMENTARY METAL OXIDE SEMICONDUCTOR STRUCTURES

    公开(公告)号:DE3371264D1

    公开(公告)日:1987-06-04

    申请号:DE3371264

    申请日:1983-10-11

    Applicant: IBM

    Abstract: A simple process is provided for making a planar CMOS structure wherein isolation regions required by bulk CMOS structures are first formed, an N channel device field region is self-aligned to an N well region in a semiconductor substrate and a refractory material is twice defined for forming P and N channels, the first definition masking P channel source and drain regions while defining the N channel and the second definition defining the P channel while using a photoresist layer to mask the N channel. In the process, a technique which uses a single mask level defines the well region and self-aligns the necessary field doping to the well region to provide closely spaced N and P channel devices.

    4.
    发明专利
    未知

    公开(公告)号:AT26897T

    公开(公告)日:1987-05-15

    申请号:AT83110131

    申请日:1983-10-11

    Applicant: IBM

    Abstract: A simple process is provided for making a planar CMOS structure wherein isolation regions required by bulk CMOS structures are first formed, an N channel device field region is self-aligned to an N well region in a semiconductor substrate and a refractory material is twice defined for forming P and N channels, the first definition masking P channel source and drain regions while defining the N channel and the second definition defining the P channel while using a photoresist layer to mask the N channel. In the process, a technique which uses a single mask level defines the well region and self-aligns the necessary field doping to the well region to provide closely spaced N and P channel devices.

    5.
    发明专利
    未知

    公开(公告)号:DE3581852D1

    公开(公告)日:1991-04-04

    申请号:DE3581852

    申请日:1985-06-24

    Applicant: IBM

    Abstract: The overvoltage protection circuit, when used with CMOS circuits, protects them from overvoltage conditions while minimizing latch-up conditions in the structure. It consists of a well region (16) of an opposite conductivity to that of the substrate (10, 12) defining a pocket region (18) having a conductivity type which is similar to that of the substrate (10, 12). A first PN junction diode (34) is formed in a portion of the well region (16) and a second PN junction diode (32) is formed in the pocket region (18). The two diodes have opposite polarity and they both are connected to a signal line in such a way that one of the two diodes will be forward biased if the voltage on the signal line exceeds the bounds of the power supply voltages. The pocket region (18) is connected to a Vss terminal which is normally grounded and the well region (16) is connected to a power supply VDD. The doping concentration in the well region (16) is predetermined to have a gradient so that minority carriers injected from one of the diodes in the well region will be repulsed and prevented from moving into the substrate region where they would be majority carriers and they could cause latch-up in the structure or at the very least adversely affect the voltage level of the substrate. Instead the injected carriers recombine in the well region (16) or are collected by the adjacent isolated pocket region (18). … When the second diode (32) is forward biased, the minority carriers are injected into the isolated pocket region (18) and are prevented from reaching the substrate (10) by the underlying well region (14). This prevents these carriers from affecting the operation of adjacent circuits.

    7.
    发明专利
    未知

    公开(公告)号:BR8306653A

    公开(公告)日:1984-07-31

    申请号:BR8306653

    申请日:1983-12-02

    Applicant: IBM

    Abstract: A simple process is provided for making a planar CMOS structure wherein isolation regions required by bulk CMOS structures are first formed, an N channel device field region is self-aligned to an N well region in a semiconductor substrate and a refractory material is twice defined for forming P and N channels, the first definition masking P channel source and drain regions while defining the N channel and the second definition defining the P channel while using a photoresist layer to mask the N channel. In the process, a technique which uses a single mask level defines the well region and self-aligns the necessary field doping to the well region to provide closely spaced N and P channel devices.

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