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公开(公告)号:DE3265822D1
公开(公告)日:1985-10-03
申请号:DE3265822
申请日:1982-05-28
Applicant: IBM
Inventor: DESILETS BRIAN HENRY , GUNTHER THOMAS ANTHONY
IPC: C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , C23F1/00 , G01N11/02
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公开(公告)号:DE3854113T2
公开(公告)日:1996-02-29
申请号:DE3854113
申请日:1988-09-27
Applicant: IBM
Inventor: DESILETS BRIAN HENRY , KAPLAN RICHARD DEAN , SACHDEV HARBANS SINGH , SACHDEV KRISHNA GANDHI , SANCHEZ SUZAN ANN
IPC: H01L21/302 , G03F7/09 , H01B13/00 , H01L21/3065
Abstract: A method of image transfer into a substrate by reactive ion etch technique is provided. A mask layer on said substrate is formed by a spin-on film which film is comprised of a mixed organo-functional zircoaluminate or zircotitanate material. The film is dried and cured, and thereafter coated with a radiation sensitive resist. The resist is image wise exposed and developed, which developing preferably also removes the pattern in the mask exposing the substrate. The substrate is then reactive ion etched, the remaining film acting as a barrier material to the etching.
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公开(公告)号:DE3854113D1
公开(公告)日:1995-08-10
申请号:DE3854113
申请日:1988-09-27
Applicant: IBM
Inventor: DESILETS BRIAN HENRY , KAPLAN RICHARD DEAN , SACHDEV HARBANS SINGH , SACHDEV KRISHNA GANDHI , SANCHEZ SUZAN ANN
IPC: H01L21/302 , G03F7/09 , H01B13/00 , H01L21/3065
Abstract: A method of image transfer into a substrate by reactive ion etch technique is provided. A mask layer on said substrate is formed by a spin-on film which film is comprised of a mixed organo-functional zircoaluminate or zircotitanate material. The film is dried and cured, and thereafter coated with a radiation sensitive resist. The resist is image wise exposed and developed, which developing preferably also removes the pattern in the mask exposing the substrate. The substrate is then reactive ion etched, the remaining film acting as a barrier material to the etching.
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公开(公告)号:DE3679854D1
公开(公告)日:1991-07-25
申请号:DE3679854
申请日:1986-04-21
Applicant: IBM
Inventor: DESILETS BRIAN HENRY , GUNTHER THOMAS ANTHONY , HENDRICKS CHARLES JOSEPH , KELLER JOHN HOWARD
IPC: H01L21/302 , C23F4/00 , H01J37/32 , H01L21/3065
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