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公开(公告)号：JPS6345826A
公开(公告)日：1988-02-26
申请号：JP12727687
申请日：1987-05-26
Applicant: IBM
Inventor： MAIKERU JIYON BURADEII , SANGU KUUON KANGU , POORU ANDORIYUU MOSUKOUITSUTSU , JIEEMUZU GAADONAA RAIAN , TEIMOSHII KURAAKU REIRII , ERITSUKU GUREGORI UORUTON , HARII RANDOORU BITSUKUFUOODO , MAIKERU JIYON PAAMAA
IPC: H01L21/60 , H01L23/485
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