公开(公告)号：CA1091363A

公开(公告)日：1980-12-09

申请号：CA310045

申请日：1978-08-25

Applicant: IBM

Inventor： HICKS WILLIAM W ,  KELLER JOHN H ,  KOESTNER JOSEPH H

IPC: G01Q30/10 ,  H01J37/08 ,  H01J37/09 ,  H01J37/317 ,  H01L21/027 ,  H01J3/00

Abstract: RADIATION HEATED ACCELERATION In an ion implantation apparatus, a beam defining member such as the acceleration plate is constructed such that the member is maintained at a temperature above the condensation point of the vapor emanating from the source of charged particles, thereby preventing the vapor from condensing on the member and providing a self-cleaning effect.

公开(公告)号：CA1089113A

公开(公告)日：1980-11-04

申请号：CA298328

申请日：1978-03-02

Applicant: IBM

Inventor： FORNERIS JOHN L ,  HICKS WILLIAM W ,  KELLER JOHN H ,  MCKENNA CHARLES M ,  SEIRMARCO JAMES A

IPC: H01J37/20 ,  G01Q60/00 ,  H01J37/02 ,  H01J37/244 ,  H01J37/317 ,  H01L21/265

Abstract: ION IMPLANTATION APPARATUS FOR CONTROLLING THE SURFACE POTENTIAL OF A TARGET SURFACE In an ion beam apparatus a structure for controlling the surface potential of the target comprising an electron source adjacent to the beam for providing electrons to the beam and means between the target and source for inhibiting rectilinear radiations, i.e., electron and other particle and photon radiations between said source and said target. This prevents heating of the target by the electron source and cross-contamination between the source and the target. A further structure is provided for the measurement of the ion beam current while controlling said surface potential of the target which includes: walls adjacent to and electrically insulated from the target and surrounding the beam whereby the walls and target provide a Faraday Cage, means for introducing variable quantities or electrons into the beam within the Faraday Cage, means for measuring the target current, means for combining and measuring the target and wall currents to provide said ion beam current measurement and means for varying the quantities of introduced electrons to control the target current and thereby the target surface potential.