公开(公告)号：AT364860T

公开(公告)日：2007-07-15

申请号：AT01993186

申请日：2001-11-30

Applicant: IBM

Inventor： CALLEGARI ALESSANDRO ,  CHAUDHARI PRAVEEN ,  DOANY FUAD E ,  DOYLE JAMES ,  GALLIGAN EILEEN ,  HOUGHAM GARETH ,  GLOWNIA JAMES ,  LACEY JAMES ,  LIEN SHUI-CHIH ,  LU MINHAU ,  ROSENBLUTH ALAN ,  YANG KEI-HSIUNG

IPC: G02F1/1337 ,  B01J19/12 ,  C01B31/02 ,  C23C14/48 ,  C23C14/58

Abstract: A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.