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公开(公告)号：SG96265A1
公开(公告)日：2003-05-23
申请号：SG200107623
申请日：2001-12-06
Applicant: IBM
Inventor： ARNE W BALLANTINE , JEFFREY SCOTT BROWN , JEFFREY D GILBERT , JAMES J QUINLIVAN , JAMES ALBERT SLINKMAN , ANTHONY C SPERANZA
IPC: H01L21/76 , H01L21/316 , H01L21/762 , H01L21/31
Abstract: A structure comprising a trench having a liner with rounded corners in the top and bottom of the trench is obtained by rapid thermal oxidation.
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