2.
    发明专利
    未知

    公开(公告)号:DE69128208D1

    公开(公告)日:1998-01-02

    申请号:DE69128208

    申请日:1991-03-05

    Applicant: IBM

    Abstract: Disclosed is a multilayer circuit package (101) having a buried thin film capacitor (141). The circuit packages includes at least a power core (111a), a ground core (111b), a first signal core (121), a second signal core (131), and the integral, buried, thin film capacitor. The integral, buried, thin film capacitor (141) serves to capacitively couple the first and second signal cores. Structurally, the first signal core includes at least one first wire (123) that terminates in at least one first electrode (125), while the second signal core includes at least one second wire (133) that terminates in at least one second electrode (135). At least a portion of the first electrode overlays at least a portion of the second electrode and is separated therefrom by a thin film of a dielectric material (151). The first electrode, the second electrode, and the thin film of dielectric material define the integral buried capacitor. The thin film capacitor is prepared by thin film methods, with epitaxial deposition of the dielectric.

    8.
    发明专利
    未知

    公开(公告)号:DE69128208T2

    公开(公告)日:1998-05-28

    申请号:DE69128208

    申请日:1991-03-05

    Applicant: IBM

    Abstract: Disclosed is a multilayer circuit package (101) having a buried thin film capacitor (141). The circuit packages includes at least a power core (111a), a ground core (111b), a first signal core (121), a second signal core (131), and the integral, buried, thin film capacitor. The integral, buried, thin film capacitor (141) serves to capacitively couple the first and second signal cores. Structurally, the first signal core includes at least one first wire (123) that terminates in at least one first electrode (125), while the second signal core includes at least one second wire (133) that terminates in at least one second electrode (135). At least a portion of the first electrode overlays at least a portion of the second electrode and is separated therefrom by a thin film of a dielectric material (151). The first electrode, the second electrode, and the thin film of dielectric material define the integral buried capacitor. The thin film capacitor is prepared by thin film methods, with epitaxial deposition of the dielectric.

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