公开(公告)号：JPH07233325A

公开(公告)日：1995-09-05

申请号：JP31944394

申请日：1994-11-30

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  JIEFURII DONARUDO JIEROOMU ,  JIEFURII UIRIAMU RABADEII ,  DEIBITSUDO ANDORUU RUISU ,  SARII AN SUWANSON ,  NANSHII KARORIN RABIANKA

IPC: G03F7/027 ,  C08G73/10 ,  C08L79/08 ,  G03F7/038

公开(公告)号：JPH0641305A

公开(公告)日：1994-02-15

申请号：JP27671092

申请日：1992-09-22

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  JIEFURII DONARUDO JIEROOMU ,  JIEFURII UIRIAMU RABADEII ,  DEIBITSUDO ANDORUU RUISU ,  SARII AN SUWANSON ,  NANSHII KARORIN RABIANKA

IPC: G03F7/027 ,  C08G73/10 ,  C08L79/08 ,  G03F7/038

公开(公告)号：JPH0643640A

公开(公告)日：1994-02-18

申请号：JP25254792

申请日：1992-09-22

Applicant: IBM

Inventor： JIEFURII DONARUDO JIEROOMU ,  MAATEIN JIYOZEFU GOORUDOBAAGU ,  NANSHII KARORIN RABIANKA ,  JIEIN MAAGARETSUTO SHIYOO

IPC: C08G73/10 ,  C08L79/08 ,  G03F7/004 ,  G03F7/027 ,  G03F7/037 ,  G03F7/038

Abstract: PURPOSE: To obtain a compsn. increasing resolution and sensitivity while reducing the lass of thickness at the time of development by using a polyimide precursor and a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group as a reactivity modifier. CONSTITUTION: An unmodified polyimide precursor such as a precursor of polyester imide, polyamide-imide-ester, polyamide-imide or polysiloxane-imide as well as other mixed polyimides is included in a polyimide precursor (polyamic acid) used. A required reactivity modifier is a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group. This tert. amino functional substance preferably contains a polymerizable part such as an ethylenic unsatd. part and/or plural tert. amino positions.