公开(公告)号：JPH07233325A

公开(公告)日：1995-09-05

申请号：JP31944394

申请日：1994-11-30

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  JIEFURII DONARUDO JIEROOMU ,  JIEFURII UIRIAMU RABADEII ,  DEIBITSUDO ANDORUU RUISU ,  SARII AN SUWANSON ,  NANSHII KARORIN RABIANKA

IPC: G03F7/027 ,  C08G73/10 ,  C08L79/08 ,  G03F7/038

公开(公告)号：JPH05121313A

公开(公告)日：1993-05-18

申请号：JP8070492

申请日：1992-04-02

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  MITSUCHIERU SAIMONZU KOOEN ,  ANDORUU TOMASU SUCHIYUAATO POM ,  DENISU RII ROJIYAAZU

IPC: H01L21/027 ,  G02B6/122 ,  G02B6/42 ,  H01L31/10

Abstract: PURPOSE: To protect a photosensitive region in an integrated circuit from stray light and restrain interference in an optical connector, etc. by coating an entire photosensitive region with a specified material and exposing it to a radiation ray. CONSTITUTION: A photosensor 201 is integrated onto a wafer 200. An entire photosensitive region 203 is coated with a first material, which is converted into a light-blocking layer, when irradiated by a lithographic method for protecting the photosensitive region 203 in an integrated circuit, including at least one photodetection region 202 from the action of a stray light. A coated photosensitive region is exposed to the radiation ray by a lithographic method, and the first material is converted into a light blocking layer. In the process, exposure is carried out by a method, which ensures that any photodetection region contained inside an integrated circuit is not covered with a light-blocking layer.

公开(公告)号：JPH0641305A

公开(公告)日：1994-02-15

申请号：JP27671092

申请日：1992-09-22

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  JIEFURII DONARUDO JIEROOMU ,  JIEFURII UIRIAMU RABADEII ,  DEIBITSUDO ANDORUU RUISU ,  SARII AN SUWANSON ,  NANSHII KARORIN RABIANKA

IPC: G03F7/027 ,  C08G73/10 ,  C08L79/08 ,  G03F7/038

公开(公告)号：JPH0388819A

公开(公告)日：1991-04-15

申请号：JP10899690

申请日：1990-04-26

Applicant: IBM

Inventor： MARII ANJIEROPOUROSU ,  UU-SON HOWAN ,  RICHIYAADO DEIIN KAPURAN ,  MARII ANITSUKU RUKOORU ,  SUTANREE YUUJIIN PEREIARUTO ,  JIEIN MAAGARETSUTO SHIYOO ,  MISHIERU ROBEERU TEISHIE ,  JIYOOJI FUREDERITSUKU UOOKAA

IPC: G03F7/038 ,  C08F38/00 ,  C08G61/00 ,  C08G61/02 ,  C08G61/10 ,  C08G61/12 ,  C08G73/00 ,  C08G75/02 ,  C08G75/06 ,  C08K3/00 ,  C08K5/00 ,  C08L79/00 ,  C08L81/02 ,  H01B1/12 ,  H01J29/86 ,  H01L21/027 ,  H01L21/30 ,  H01L23/498 ,  H01L23/60 ,  H05K1/09 ,  H05K9/00