公开(公告)号：JP2006059348A

公开(公告)日：2006-03-02

申请号：JP2005233945

申请日：2005-08-12

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： COHN JOHN M ,  CULP JAMES A ,  FINKLER ULRICH A ,  HENG FOOK-LUEN ,  MARK A RABIN ,  LEE JIN FUW ,  LAAS W LIEBMANN ,  NORTHROP GREGORY A ,  SEONG NAKGEUON ,  SINGH RAMA N ,  STOK LEON ,  WOLTGENS PIETER J

IPC: G06F17/50 ,  G03F1/08 ,  H01L21/82

CPC classification number: G06F17/5081 ,  G06F17/5009 ,  G06F17/5072

Abstract: PROBLEM TO BE SOLVED: To provide a design tool which improves manufacturability of a design, namely, gives such a design that a fabricated wafer more exactly meets intended/assumed/modeled properties, at lower manufacturing cost and risk. SOLUTION: A design system for designing complex integrated circuits (ICs), a method of IC design, and program products therefor are provided. A layout unit receives a circuit description representing portions in a grid and glyph format. A checking unit checks grid and glyph portions of the design. An elaboration unit generates a target layout from the checked design. A data preparatory unit prepares the target layout for mask making. A pattern caching unit selectively replaces portions of the design with previously cached results for improved design efficiency. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种提高设计的可制造性的设计工具，即提供这样的设计，即制造的晶片更准确地满足预期/假设/建模性能，具有较低的制造成本和风险。

解决方案：提供了一种用于设计复杂集成电路（IC）的设计系统，一种IC设计方法及其程序产品。 布局单元接收表示网格和字形格式的部分的电路描述。 检查单元检查设计的网格和字形部分。 精心设计单元从检查的设计生成目标布局。 数据准备单元准备面具制作的目标布局。 模式高速缓存单元用先前缓存的结果有选择地替换设计的部分，以提高设计效率。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：DE69611563D1

公开(公告)日：2001-02-22

申请号：DE69611563

申请日：1996-02-13

Applicant: IBM

Inventor： CHIU GEORGE L ,  CIPPOLA THOMAS M ,  DOANY FUAD E ,  DOVE DEREK B ,  ROSENBLUTH ALAN E ,  SINGH RAMA N ,  WILCZYNSKI JANUSZ S

IPC: G02F1/13 ,  G02F1/1335 ,  G03B21/00 ,  H04N5/74 ,  H04N9/31

Abstract: An optical system is described consisting of reflection birefringent light valves, polarizing beam splitter, color image combining prisms, illumination system, projection lens, filters for color and contrast control, and screen placed in a configuration offering advantages for a high resolution color display. The system includes a quarter wave plate positioned to suppress stray reflection from the projection lens. The system also includes a second quarter wave plate disposed on the screen and a polarizing film disposed on the second quarter wave plate to suppress ambient light from illuminating the screen and entering the system.

公开(公告)号：DE69611561D1

公开(公告)日：2001-02-22

申请号：DE69611561

申请日：1996-02-13

Applicant: IBM

Inventor： CHIU GEORGE LIANG-TAI ,  CIPOLLA THOMAS M ,  DOANY FUAD E ,  DOVE DEREK B ,  ROSENBLUTH ALAN E ,  SINGH RAMA N ,  WILCZYNSKI JANUSZ S

IPC: G02F1/13 ,  G02F1/1335 ,  H04N5/74 ,  H04N9/31

Abstract: An optical system is described consisting of reflection birefringent light valves, polarizing beam splitter, color image combining prisms, illumination system, projection lens, filters for color and contrast control, and screen placed in a configuration offering advantages for a high resolution color display. The illumination system includes a light tunnel having a cross-sectional shape corresponding to the geometrical shape of the spacial light modulator to optimize the amount of light projected onto the screen.

公开(公告)号：DE69611561T2

公开(公告)日：2001-06-21

申请号：DE69611561

申请日：1996-02-13

Applicant: IBM

Inventor： CHIU GEORGE LIANG-TAI ,  CIPOLLA THOMAS M ,  DOANY FUAD E ,  DOVE DEREK B ,  ROSENBLUTH ALAN E ,  SINGH RAMA N ,  WILCZYNSKI JANUSZ S

IPC: G02F1/13 ,  G02F1/1335 ,  H04N5/74 ,  H04N9/31

Abstract: An optical system is described consisting of reflection birefringent light valves, polarizing beam splitter, color image combining prisms, illumination system, projection lens, filters for color and contrast control, and screen placed in a configuration offering advantages for a high resolution color display. The illumination system includes a light tunnel having a cross-sectional shape corresponding to the geometrical shape of the spacial light modulator to optimize the amount of light projected onto the screen.

公开(公告)号：DE69611563T2

公开(公告)日：2001-06-21

申请号：DE69611563

申请日：1996-02-13

Applicant: IBM

Inventor： CHIU GEORGE L ,  CIPPOLA THOMAS M ,  DOANY FUAD E ,  DOVE DEREK B ,  ROSENBLUTH ALAN E ,  SINGH RAMA N ,  WILCZYNSKI JANUSZ S

IPC: G02F1/13 ,  G02F1/1335 ,  G03B21/00 ,  H04N5/74 ,  H04N9/31

Abstract: An optical system is described consisting of reflection birefringent light valves, polarizing beam splitter, color image combining prisms, illumination system, projection lens, filters for color and contrast control, and screen placed in a configuration offering advantages for a high resolution color display. The system includes a quarter wave plate positioned to suppress stray reflection from the projection lens. The system also includes a second quarter wave plate disposed on the screen and a polarizing film disposed on the second quarter wave plate to suppress ambient light from illuminating the screen and entering the system.

公开(公告)号：CA2045944C

公开(公告)日：1995-06-13

申请号：CA2045944

申请日：1991-06-28

Applicant: IBM

Inventor： SINGH RAMA N ,  WILCZYNSKI JANUSZ S

IPC: G02B13/24 ,  G02B13/26 ,  G02B17/00 ,  G02B17/08 ,  G02B27/00 ,  G02B27/18 ,  G03F7/20 ,  H01L21/027

Abstract: An optical system having a substantially flat image field is disclosed. The optical system is formed from optical subsystems wherein an input optical subsystem forms an intermediate image which is the object of an output optical system. The intermediate image has a curvature which compensates that from the remaining optical components of the system to result in a substantially flat image for the optical system. Preferably, the optical elements preceding the intermediate image and the optical elements succeeding the intermediate image are separately corrected for odd aberrations. The optical elements preceding the intermediate image and the optical elements succeeding the intermediate image compensate for each other and result in a substantially aberration free flat image for the optical system. The optical system preferably contains an input optical subsystem and an output optical subsystem wherein the input optical subsystem is a catadioptric system and wherein the output optical system is a dioptric system. Most preferably the input optical system is a 1X catadioptric system and the output optical system is an NX dioptric system. The optical systems of the present invention are used for subquarter micron photolithography tools for microelectronic fabrication, such as scanners and steppers.