公开(公告)号：JP2000190300A

公开(公告)日：2000-07-11

申请号：JP21079199

申请日：1999-07-26

Applicant: IBM

Inventor： BLACK CHARLES T ,  STEPHEN M GATES ,  MURRAY CHRISTOPHER B ,  SUN SHOUHEN

IPC: B82B1/00 ,  C01G49/00 ,  C07B61/00 ,  C12N15/10 ,  G11B5/62 ,  G11B5/84 ,  H01F1/00 ,  H01F1/047

Abstract: PROBLEM TO BE SOLVED: To form a stratification structure of nano-meter(nm) scale particles by placing a lattice-shaped lattice layer containing deoxyribo nucleic acid(DNA) so as to form a cell of the lattice layer on the surface of a substrate, and arranging a single particle in each cell. SOLUTION: A lattice constant of a stratification structure (a second lattice) of nano-meter scale particles is controlled by a lattice layer coincident in DNA. A DNA lattice (a first lattice) is manufactured using an automatic synthesizing method, this arrangement causes DNA to form a regular arrangement in an opening or a lattice site by self organization so as to include a specific nucleotide base arrangement. Then (a) a substrate 1 having a surface, (b) the lattice- shaped lattice layer containing a DNA segment arranged so as to form a cell of the lattice layer are arranged on the surface of the substrate 1, and (c) at least one particle 3 is placed in each cell. Thus, a stratification structure of nano-meter scale particles can be easily formed.

公开(公告)号：JP2001067963A

公开(公告)日：2001-03-16

申请号：JP2000222629

申请日：2000-07-24

Applicant: IBM

Inventor： STEVEN MCCONELL GATES ,  MURRAY CHRISTOPHER BRUCE ,  SUN SHOUHEN

IPC: H01B19/00 ,  H01B17/56 ,  H01L21/76

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a porous dielectric of low dielectric constant having uniform dielectric property throughout the body and the peripheral surface. SOLUTION: A mixture of a solvent, sacrificial nano particles 13 in first quantity and structural nano particles 11 in second quantity is prepared first. The structural nano particles 11 contain organic components. The mixture is concentrated to form a lattice structure with scattered sacrificial nano particles 13. The structural nano particles 11 are fused to make the structural nano particles 11 and the lattice structure rigid. The sacrificial nano particles 13 are removed from the lattice structure to leave cavities in the lattice structure. Finally, the surfaces of the cavities are coated with a hydrophobic material. A device constructed in this method is also described.