公开(公告)号：DE69302029T2

公开(公告)日：1996-10-24

申请号：DE69302029

申请日：1993-01-21

Applicant: IBM

Inventor： CUOMO JEROME JOHN ,  GUARNIERI CHARLES RICHARD ,  HOPWOOD JEFFREY ALAN ,  WHITEHAIR STANLEY JOSEPH

IPC: H01L21/205 ,  C23F4/00 ,  H01J37/32 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31

公开(公告)号：DE69302029D1

公开(公告)日：1996-05-09

申请号：DE69302029

申请日：1993-01-21

Applicant: IBM

Inventor： CUOMO JEROME JOHN ,  GUARNIERI CHARLES RICHARD ,  HOPWOOD JEFFREY ALAN ,  WHITEHAIR STANLEY JOSEPH

IPC: H01L21/205 ,  C23F4/00 ,  H01J37/32 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31

公开(公告)号：DE69431394D1

公开(公告)日：2002-10-24

申请号：DE69431394

申请日：1994-12-21

Applicant: IBM

Inventor： HEDRICK JEFFREY CURTIS ,  LEWIS DAVID ANDREW ,  SHAW JANE MARGARET ,  VIEHBECK ALFRED ,  WHITEHAIR STANLEY JOSEPH

IPC: H05B6/80 ,  H05B6/62 ,  H05B6/78

Abstract: A microwave processing system is provided wherein the material to be processed is in the form of a web type quantity configuration with a thickness that is small in relation to the wavelength of a particular microwave frequency. The material is passed through the field associated with a plurality of microwave standing waves of the particular frequency, each adjacent standing wave being offset 1/4 wavelength along the direction of movement of the web. A carrier gas removes volatile solvents from the material surfaces. Control is provided for the interrelationship of temperature, rate of movement, flow of carrier gas, and microwave power.

公开(公告)号：MY117278A

公开(公告)日：2004-06-30

申请号：MYPI9403563

申请日：1994-12-29

Applicant: IBM

Inventor： HEDRICK JEFFREY CURTIS ,  LEWIS DAVID ANDREW ,  SHAW JANE MARGARET ,  VIEHBECK ALFRED ,  WHITEHAIR STANLEY JOSEPH

IPC: H05B6/80 ,  H05B6/62 ,  H05B6/78

Abstract: A MICROWAVE PROCESSING SYSTEM IS PROVIDED WHEREIN THE MATERIAL TO BE PROCESSED IS IN THE FORM OF WEB TYPE QUANTITY CONFIGURATION WITH A THICKNESS THAT IS SMALL IN RELATION TO THE WAVELENGTH OF A PARTICULAR MICROWAVE FREQUENCY. THE MATERIAL IS PASSED THROUGH THE FIELD ASSOCIATED WITH A PLURALITY OF MICROWAVE STANDING WAVES OF THE PARTICULAR FREQUENCY, EACH ADJACENT STANDING WAVE BEING OFFSET 1/4 WAVELENGTH ALONG THE DIRECTION OF MOVEMENT OF THE WEB. A CARRIER GAS REMOVES VOLATILE SOLVENTS FROM THE MATERIAL SURFACES.CONTROL IS PROVIDED FOR THE INTERRELATIONSHIP OF TEMPERATURE,RATE OF MOVEMENT, FLOW OF CARRIER GAS, AND MICROWAVE POWER.

公开(公告)号：DE69431394T2

公开(公告)日：2003-06-05

申请号：DE69431394

申请日：1994-12-21

Applicant: IBM

Inventor： HEDRICK JEFFREY CURTIS ,  LEWIS DAVID ANDREW ,  SHAW JANE MARGARET ,  VIEHBECK ALFRED ,  WHITEHAIR STANLEY JOSEPH

IPC: H05B6/80 ,  H05B6/62 ,  H05B6/78

Abstract: A microwave processing system is provided wherein the material to be processed is in the form of a web type quantity configuration with a thickness that is small in relation to the wavelength of a particular microwave frequency. The material is passed through the field associated with a plurality of microwave standing waves of the particular frequency, each adjacent standing wave being offset 1/4 wavelength along the direction of movement of the web. A carrier gas removes volatile solvents from the material surfaces. Control is provided for the interrelationship of temperature, rate of movement, flow of carrier gas, and microwave power.