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公开(公告)号：DE3866659D1
公开(公告)日：1992-01-16
申请号：DE3866659
申请日：1988-09-05
Applicant: IBM
Inventor： BAUSMITH ROBERT CROWELL , COTE WILLIAM JOSEPH , CRONIN JOHN EDWARD , HOLLAND KAREY LYNN , KAANTA CARTER WELLING , LEE PEI-ING PAUL , WRIGHT TERRANCE MONTE
IPC: C23F4/00 , H01L21/3213 , H01L21/31
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