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公开(公告)号：EP2168163A4
公开(公告)日：2012-08-01
申请号：EP08771894
申请日：2008-06-25
Applicant: IBM
Inventor： ESHUN EBENEZER E , JOHNSON JEFFREY B , PHELPS RICHARD A , RASSEL ROBERT M , ZIERAK MICHAEL L
IPC: H01L29/808 , H01L21/337 , H01L29/36
CPC classification number: H01L29/808 , H01L27/0617 , H01L27/098 , H01L29/36 , H01L29/66901
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