公开(公告)号：EP2286444A4

公开(公告)日：2012-11-21

申请号：EP09747138

申请日：2009-04-28

Applicant: IBM

Inventor： ESHUN EBENEZER E ,  HE ZHONG-XIANG ,  RASSEL ROBERT M ,  COOLBAUGH DOUGLAS ,  GEBRESELASIE EPHREM G ,  WANG PING-CHUAN ,  KIM DEOK-KEE ,  KOTHANDARAMAN CHANDRASEKHARAN ,  ROBSON NORMAN W ,  MOY DAN ,  SAFRAN JOHN M ,  STEIN KENNETH J ,  HO HERBERT L ,  YAN HONGWEN

IPC: H01L23/525 ,  H01L27/06

CPC classification number: H01L27/0629 ,  H01L23/5252 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP2168163A4

公开(公告)日：2012-08-01

申请号：EP08771894

申请日：2008-06-25

Applicant: IBM

Inventor： ESHUN EBENEZER E ,  JOHNSON JEFFREY B ,  PHELPS RICHARD A ,  RASSEL ROBERT M ,  ZIERAK MICHAEL L

IPC: H01L29/808 ,  H01L21/337 ,  H01L29/36

CPC classification number: H01L29/808 ,  H01L27/0617 ,  H01L27/098 ,  H01L29/36 ,  H01L29/66901

公开(公告)号：EP1671358A4

公开(公告)日：2009-10-21

申请号：EP04789450

申请日：2004-09-30

Applicant: IBM

Inventor： COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  GAMBINO JEFFREY P ,  HE ZHONG-XIANG ,  RAMACHANDRAN VIDHYA

IPC: H01L27/108 ,  H01L21/02 ,  H01L21/768 ,  H01L29/76 ,  H01L29/94 ,  H01L31/119

CPC classification number: H01L21/7687 ,  H01L23/5223 ,  H01L23/53238 ,  H01L28/75 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP1849167A4

公开(公告)日：2010-06-09

申请号：EP06720491

申请日：2006-02-08

Applicant: IBM

Inventor： CHINTHAKINDI ANIL K ,  ESHUN EBENEZER E

IPC: H01C1/012 ,  H01L21/02 ,  H01L23/522 ,  H01L27/06

CPC classification number: H01L28/24 ,  H01C7/006 ,  H01L23/5228 ,  H01L27/0629 ,  H01L27/0688 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP1792343A4

公开(公告)日：2009-11-11

申请号：EP05754954

申请日：2005-05-26

Applicant: IBM

Inventor： COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  FEILCHENFELD NATALIE ,  GAUTSCH MICHAEL L ,  HE ZHONG-XIANG ,  MOON MATTHEW D ,  RAMACHANDRAN VIDHYA ,  WATERHOUSE BARBARA

IPC: H01L21/8242 ,  H01L21/02 ,  H01L21/20 ,  H01L23/522 ,  H01L27/01 ,  H01L27/08

CPC classification number: H01L23/5223 ,  H01L27/016 ,  H01L27/0805 ,  H01L28/40 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

公开(公告)号：JP2008004939A

公开(公告)日：2008-01-10

申请号：JP2007160933

申请日：2007-06-19

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： HE ZHONG-XIANG ,  ESHUN EBENEZER E ,  DOUGLAS D COOLBAUGH ,  RASSEL ROBERT MARK

IPC: H01L21/822 ,  H01L21/3205 ,  H01L23/52 ,  H01L27/04

CPC classification number: H01L28/60

Abstract: PROBLEM TO BE SOLVED: To provide an MIM capacitor device and a method for manufacturing it. SOLUTION: This device includes: an upper plate which comprises one or more conductive layers and has an upper surface, a lower surface and a side wall; a spreader plate which comprises one or more conductive layers and has an upper surface, a lower surface and a side wall; and a dielectric block which comprises one or more dielectric layers and has an upper surface, a lower surface and a side wall. The upper surface of the dielectric block is physically in contact with the lower surface of the upper plate. The lower surface of the dielectric block is above the upper surface of the spreader plate. The side wall of the upper plate and the dielectric block is essentially coplanar. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种MIM电容器装置及其制造方法。 解决方案：该装置包括：上板，其包括一个或多个导电层，并具有上表面，下表面和侧壁; 包括一个或多个导电层并具有上表面，下表面和侧壁的扩展板; 以及包括一个或多个电介质层并具有上表面，下表面和侧壁的介电块。 介质块的上表面物理地与上板的下表面接触。 介质块的下表面在扩展板的上表面之上。 上板和介质块的侧壁基本上是共面的。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2006196894A

公开(公告)日：2006-07-27

申请号：JP2006001619

申请日：2006-01-06

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  HOOK TERENCE B ,  RASSEL ROBERT M ,  SPROGIS EDMUND J ,  STAMPER ANTHONY K ,  MURPHY WILLIAM J

IPC: H01L23/36 ,  H01L23/373

CPC classification number: H01C7/1013 ,  H01C1/084 ,  H01L2924/0002 ,  Y10T29/49083 ,  Y10T29/49085 ,  Y10T29/49099 ,  Y10T29/49144 ,  Y10T29/49147 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To provide a resistor that has a heat sink with excellent heat conduction. SOLUTION: This heat sink includes a conduction path that has a high-thermal conductivity metal and other thermal conductors. In order that an electrical resistor may not be short-circuited to earth by this thermal resistor, a thin layer with a high-thermal conductivity electric insulator is interposed between the thermal conductor and the resistor's body. Accordingly, since heat is conducted to the heat sink in a direction in which the thermal conductor with high thermal conductivity moves away from the resistor, the resistor can pass a large amount of current. In addition to the fact that a parasitic capacitance and other electric parasitic actions that help reduce high-frequency responses from the electric resistor are lowered, various structures of a thermal conductor and heat sink are achieved through which favorable thermal conduction characteristics are obtained. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有散热器的具有优异热传导性的电阻器。 解决方案：该散热器包括具有高导热性金属和其他热导体的导电路径。 为了使该电阻器不会被该热电阻器短路到地，具有高导热电绝缘体的薄层插入在热导体和电阻体之间。 因此，由于在热导率高的导体从电阻器移开的方向向散热器传导热量，所以电阻器能够通过大量的电流。 除了有助于降低来自电阻器的高频响应的寄生电容和其他电寄生作用降低之外，还实现了热导体和散热器的各种结构，从而获得了良好的热传导特性。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：WO2005034201A3

公开(公告)日：2007-12-06

申请号：PCT/US2004032405

申请日：2004-09-30

Applicant: IBM ,  COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  GAMBINO JEFFREY P ,  HE ZHONG-XIANG ,  RAMACHANDRAN VIDHYA

Inventor： COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  GAMBINO JEFFREY P ,  HE ZHONG-XIANG ,  RAMACHANDRAN VIDHYA

IPC: H01L27/108 ,  H01L21/02 ,  H01L21/768 ,  H01L29/76 ,  H01L29/94 ,  H01L31/119

CPC classification number: H01L21/7687 ,  H01L23/5223 ,  H01L23/53238 ,  H01L28/75 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method and structure for a MIM capacitor, the structure including: an electronic device, comprising: an interievel dielectric layer formed on a semiconductor substrate; a copper bottom electrode formed in the interievel dielectric layer, atop surface of the bottom electrode co-planer with a top surface of the interievel dielectric layer; a conductive diffusion barrier in direct contact with the top surface of the bottom electrode; a MIM dielectric in direct contact with a top surface of the conductive diffusion barrier; and a top electrode in direct contact with a top surface of the MIM dielectric. The conductive diffusion barrier may be recessed into the copper bottom electrode or an additional recessed conductive diffusion barrier provided. Compatible resistor and alignment mark structures are also disclosed.

Abstract translation: 一种MIM电容器的方法和结构，所述结构包括：电子器件，包括：形成在半导体衬底上的电介质层; 形成在所述层间电介质层中的铜底电极，所述底电极共平面的顶表面具有所述电介质层的顶表面; 与底部电极的顶表面直接接触的导电扩散阻挡层; 与所述导电扩散阻挡层的顶表面直接接触的MIM电介质; 以及与MIM电介质的顶表面直接接触的顶部电极。 导电扩散阻挡层可以凹进到铜底电极或设置的另外的凹入的导电扩散阻挡层中。 还公开了兼容的电阻器和对准标记结构。

公开(公告)号：WO2009140052A3

公开(公告)日：2010-01-21

申请号：PCT/US2009041861

申请日：2009-04-28

Applicant: IBM ,  ESHUN EBENEZER E ,  HE ZHONG-XIANG ,  RASSEL ROBERT M ,  COOLBAUGH DOUGLAS ,  GEBRESELASIE EPHREM G ,  WANG PING-CHUAN ,  KIM DEOK-KEE ,  KOTHANDARAMAN CHANDRASEKHARAN ,  ROBSON NORMAN W ,  MOY DAN ,  SAFRAN JOHN M ,  STEIN KENNETH J ,  HO HERBERT L ,  YAN HONGWEN

Inventor： ESHUN EBENEZER E ,  HE ZHONG-XIANG ,  RASSEL ROBERT M ,  COOLBAUGH DOUGLAS ,  GEBRESELASIE EPHREM G ,  WANG PING-CHUAN ,  KIM DEOK-KEE ,  KOTHANDARAMAN CHANDRASEKHARAN ,  ROBSON NORMAN W ,  MOY DAN ,  SAFRAN JOHN M ,  STEIN KENNETH J ,  HO HERBERT L ,  YAN HONGWEN

IPC: H01L21/335

CPC classification number: H01L27/0629 ,  H01L23/5252 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A semiconductor structure and a method for fabricating the semiconductor structure provide a field effect device located and formed upon an active region of a semiconductor substrate and at least one of a fuse structure, an anti-fuse structure and a resistor structure located and formed at least in part simultaneously upon an isolation region laterally separated from the active region within the semiconductor substrate. The field effect device includes a gate dielectric comprising a high dielectric constant dielectric material and a gate electrode comprising a metal material. The at least one of the fuse structure, anti-fuse structure and resistor structure includes a pad dielectric comprising the same material as the gate dielectric, and optionally, also a fuse, anti-fuse or resistor that may comprise the same metal material as the gate electrode.

Abstract translation: 半导体结构和半导体结构的制造方法提供一种场效应器件，其位于和形成在半导体衬底的有源区上，并且至少一个熔丝结构，抗熔丝结构和电阻结构中的至少一个至少位于并形成 部分地同时地在与半导体衬底内的有源区域横向分离的隔离区域上。 场效应器件包括包括高介电常数介电材料的栅极电介质和包括金属材料的栅电极。 熔丝结构，反熔丝结构和电阻器结构中的至少一个包括包括与栅极电介质相同的材料的焊盘电介质，以及可选地还包括熔断器，反熔丝或电阻器，其可以包括与所述栅极电介质相同的金属材料 栅电极。

公开(公告)号：DE112010003418T5

公开(公告)日：2012-08-23

申请号：DE112010003418

申请日：2010-08-26

Applicant: IBM

Inventor： BOOTH JR ROGER A ,  COOLBAUGH DOUGLAS D ,  ESHUN EBENEZER E ,  HE ZHONG-XIANG

IPC: H01L27/08 ,  H01L21/3205 ,  H01L21/768 ,  H01L21/822 ,  H01L23/52

Abstract: Eine verflochtene Struktur kann mindestens eine erste Metallleitung, mindestens eine zweite Metallleitung, die parallel zu der mindestens einen ersten Metallleitung verläuft und von der mindestens einen ersten Metallleitung getrennt ist, und eine dritte Metallleitung umfassen, die mit Enden der mindestens einen ersten Metallleitung in Kontakt steht und von der mindestens einen zweiten Metallleitung getrennt ist. Die mindestens eine erste Metallleitung steht vertikal mit keiner Metalldurchkontaktierung in Kontakt, und mindestens eine zweite Metallleitung kann vertikal mit mindestens einer Metalldurchkontaktierung in Kontakt stehen. Mehrere Schichten verflochtener Strukturen können vertikal gestapelt sein. Alternativ kann eine verflochtene Struktur mehrere erste Metallleitungen und mehrere zweite Metallleitungen umfassen, wobei keine Metallleitung vertikal mit einer Metalldurchkontaktierung in Kontakt steht. Mehrere Einheiten einer verflochtenen Struktur können sich seitlich wiederholen und einander benachbart sein, mit oder ohne Drehung, und/oder vertikal gestapelt sein, um einen Kondensator zu bilden.