MOS VARACTOR USING ISOLATION WELL
    10.
    发明公开
    MOS VARACTOR USING ISOLATION WELL 审中-公开
    MOS变容MIT隔离穆尔德河

    公开(公告)号:EP1800343A4

    公开(公告)日:2008-11-19

    申请号:EP05782737

    申请日:2005-08-05

    Applicant: IBM

    CPC classification number: H01L29/93 H01L29/94

    Abstract: The present invention provides a varactor (22) that has increased tunability and a high quality factor Q as well as a method of fabricating the varactor (22). The method of the present invention can be integrated into a conventional CMOS processing scheme or into a conventional BiCMOS processing scheme. The method includes providing a structure that includes a semiconductor substrate (12) of a first conductivity type and optionally a subcollector (14) or isolation well (i.e., doped region) of a second conductivity type located below an upper region (11) of the substrate (12), the first conductivity type is different from said second conductivity type. Next, a plurality of isolation regions (16) are formed in the upper region (11) of the substrate (12) and then a well region is formed in the upper region (11) of the substrate (12). In some cases, the doped region (14) is formed at this point of the inventive process. The well region includes outer well regions (20A and 20C) of the second conductivity type and an inner well region (20B) of the first conductivity type. Each well of said well region is separated at an upper surface by an isolation region (16). A field effect transistor having at least a gate conductor (26) of the first conductivity type is then formed above the inner well region (20B).

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