Abstract:
A semiconductor structure comprising a hyperabrupt junction varactor with a compensated cathode contact as well as a method of fabricating the same are disclosed. The method includes a single implant mask which is used in forming the subcollector/cathode, collector/well and hyperabrupt junction.
Abstract:
PROBLEM TO BE SOLVED: To provide a resistor that has a heat sink with excellent heat conduction. SOLUTION: This heat sink includes a conduction path that has a high-thermal conductivity metal and other thermal conductors. In order that an electrical resistor may not be short-circuited to earth by this thermal resistor, a thin layer with a high-thermal conductivity electric insulator is interposed between the thermal conductor and the resistor's body. Accordingly, since heat is conducted to the heat sink in a direction in which the thermal conductor with high thermal conductivity moves away from the resistor, the resistor can pass a large amount of current. In addition to the fact that a parasitic capacitance and other electric parasitic actions that help reduce high-frequency responses from the electric resistor are lowered, various structures of a thermal conductor and heat sink are achieved through which favorable thermal conduction characteristics are obtained. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
A FEOL/MEOL metal resistor (32) that has tight sheet resistance tolerance (on the order of about 5% or less), high current density (on the order of about 0.5 mA/micron or greater), lower parasitics than diffused resistors and lower TCR than standard BEOL metal resistors as well as various methods of integrating such a metal resistor structure (32) into a CMOS technology are provided.
Abstract:
The present invention provides a varactor (22) that has increased tunability and a high quality factor Q as well as a method of fabricating the varactor (22). The method of the present invention can be integrated into a conventional CMOS processing scheme or into a conventional BiCMOS processing scheme. The method includes providing a structure that includes a semiconductor substrate (12) of a first conductivity type and optionally a subcollector (14) or isolation well (i.e., doped region) of a second conductivity type located below an upper region (11) of the substrate (12), the first conductivity type is different from said second conductivity type. Next, a plurality of isolation regions (16) are formed in the upper region (11) of the substrate (12) and then a well region is formed in the upper region (11) of the substrate (12). In some cases, the doped region (14) is formed at this point of the inventive process. The well region includes outer well regions (20A and 20C) of the second conductivity type and an inner well region (20B) of the first conductivity type. Each well of said well region is separated at an upper surface by an isolation region (16). A field effect transistor having at least a gate conductor (26) of the first conductivity type is then formed above the inner well region (20B).