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公开(公告)号：DE10056544A1
公开(公告)日：2002-06-06
申请号：DE10056544
申请日：2000-11-15
Applicant: INFINEON TECHNOLOGIES AG
Inventor： KERHE MARIAN , GOLUBIC RICHARD , WOEHLERT STEFAN , MATSCHITSCH MARTIN , FERTSCHEI ANNEMARIE , UNTERWEGER JOSEF , ZERLAUTH STEFAN , SCHERF WERNER , RUDOLPH CONNY-NORBERT , LADINIG MARCELLO , KROUPA GERHARD , BINDER ALFRED , GIOVANNINI ALBERTO , AIGNER KURT , MANZONI GIULIO
IPC: B65G49/07 , H01L21/677 , H01L21/687
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