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公开(公告)号:DE59914356D1
公开(公告)日:2007-07-12
申请号:DE59914356
申请日:1999-09-17
Applicant: INFINEON TECHNOLOGIES AG
Inventor: REISINGER HANS DR , STENGL REINHARD DR , FRANOSCH MARTIN , LEHMANN VOLKER DR , SCHAEFER HERBERT DR , LANGE GERRIT DR , WENDT HERMANN DR
IPC: H01L21/225 , H01L21/3105 , H01L21/321 , H01L21/329 , H01L21/768 , H01L21/8239 , H01L27/105
Abstract: Doped region production involves thermally diffusing dopant from a semiconductor layer through an insulating interlayer (40, 70) and then making the interlayer (40, 70) electrically conductive. A doped region is produced by: (a) successively applying an insulating interlayer (40, 70) and a first conductivity type doped semiconductor layer onto a semiconductor substrate (15); (b) annealing the substrate so that dopant diffuses from the semiconductor layer through the interlayer (40, 70) into the substrate to form one or more first conductivity type doped regions (55, 80); and (c) altering the electrical conductivity of the interlayer (40, 70) to produce electrical contact between the doped region (55, 80) and the semiconductor layer. Preferred Features: The interlayer (40, 70) consists of silicon oxide and is made conductive by a voltage or current pulse.
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公开(公告)号:AT317298T
公开(公告)日:2006-02-15
申请号:AT01113300
申请日:2001-05-31
Applicant: INFINEON TECHNOLOGIES AG
Inventor: LEHMANN VOLKER DR
Abstract: Receiving a first medium present in a first phase in a capillary device comprises receiving the first medium in the capillary device using a reduced pressure; and controlling the reduced pressure in such a way that it is less than a critical pressure at which exertion in the capillary device produces a surface tension. When the first medium has been completely received by the capillary device, the tension is overcome so that the second medium in a second phase, which is different from the first phase, is received by the capillary device. An Independent claim is also included for a device for receiving a first medium. Preferred Features: The capillary device is a pipette. The critical pressure in the capillary device is determined by the formula: P = 2.S/r, where: S = the surface tension produced by the first medium in the capillary device when the first medium has been completely received by the capillary device; and r = the radius of the capillary device. The first medium is a liquid and the second medium is a gas, or the first medium is a gas and the second medium is a liquid.
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公开(公告)号:DE59915200D1
公开(公告)日:2010-10-21
申请号:DE59915200
申请日:1999-09-17
Applicant: INFINEON TECHNOLOGIES AG
Inventor: STENGL REINHARD DR , SCHAEFER HERBERT DR , REISINGER HANS DR , LEHMANN VOLKER DR , FRANOSCH MARTIN , LANGE GERRIT DR , WENDT HERMANN DR
IPC: H01L21/8247 , H01L27/102 , H01L21/8229 , H01L27/115 , H01L29/788 , H01L29/792
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