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公开(公告)号:DE10258201A1
公开(公告)日:2003-07-10
申请号:DE10258201
申请日:2002-12-12
Applicant: INFINEON TECHNOLOGIES AG , IBM
Inventor: RAIARAO JAMMY , KUDELKA STEPHAN , MACSTAV IRENE , RAHN STEPHEN , SCHROEDER UWE , TEWS HELMUT
IPC: H01L21/02 , H01L21/8242 , H01L21/308