Method of manufacturing thin-film bulk acoustic resonator filter, and circuit using the filter
    2.
    发明专利
    Method of manufacturing thin-film bulk acoustic resonator filter, and circuit using the filter 有权
    制造薄膜大容量谐振谐振滤波器的方法和使用滤波器的电路

    公开(公告)号:JP2010063142A

    公开(公告)日:2010-03-18

    申请号:JP2009254140

    申请日:2009-11-05

    CPC classification number: H03H9/564 H03H3/02 Y10T29/42

    Abstract: PROBLEM TO BE SOLVED: To provide a better method of forming a thin-film bulk acoustic resonator filter. SOLUTION: In the method of manufacturing a thin-film bulk acoustic resonator filer, a thin-film bulk acoustic resonator filter 10 includes a plurality of thin-film bulk acoustic resonators 38a to 38g series-connected and branched on the same film 35. The thin-film bulk acoustic resonators 38a to 38g are made of a single common lower conductive layer to have respective bottom electrodes of the thin-film bulk acoustic resonators. The single common conductive layer is provided to form respective upper electrodes of the thin-film bulk acoustic resonators 38a to 38g. A common piezoelectric thin-film layer, which may or may not be patterned, is formed as a thin film continuous as a single or not continuous. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种更好的形成薄膜体声波谐振器滤波器的方法。 解决方案:在制造薄膜体声波谐振器滤波器的方法中,薄膜体声波谐振器滤波器10包括在相同的膜上串联和分支的多个薄膜体声波谐振器38a至38g 薄膜体声共振器38a至38g由单个公共下导电层制成,以具有薄膜体声波谐振器的相应底部电极。 提供单个公共导电层以形成薄膜体声波谐振器38a至38g的相应上电极。 可以或可以不被图案化的公共压电薄膜层作为单独的或不连续的连续的薄膜形成。 版权所有(C)2010,JPO&INPIT

    MEMS PROBE BASED MEMORY
    3.
    发明申请
    MEMS PROBE BASED MEMORY 审中-公开
    基于MEMS探针的存储器

    公开(公告)号:WO2006071834A3

    公开(公告)日:2006-08-17

    申请号:PCT/US2005046990

    申请日:2005-12-21

    CPC classification number: G11C23/00 B82Y10/00 G11B9/1436 G11B9/149 G11C13/0004

    Abstract: In accordance with one embodiment of the invention, a memory device may include a memory layer and a MEMS layer. The memory layer may include an integrated circuit with a multiplexer and optionally a memory controller and a storage medium disposed on the integrated circuit where the storage medium includes chalcogenide islands as storage elements. The MEMS layer may include a movable MEMS platform having probes to connect selected chalcogenide islands via positioning of the MEMS platform. A high voltage source disposed external to the memory layer and the MEMS layer may provide a high voltage to a stator electrode on the memory layer and to a rotor electrode on the MEMS platform to control movement of the MEMS platform with respect to the storage medium. The memory device may be utilized in portable electronic devices such as media players and cellular telephones to provide a nonvolatile storage of information.

    Abstract translation: 根据本发明的一个实施例,存储器件可以包括存储器层和MEMS层。 存储器层可以包括具有多路复用器和可选地存储器控制器的集成电路和布置在集成电路上的存储介质,其中存储介质包括作为存储元件的硫族化物岛。 MEMS层可以包括具有通过MEMS平台的定位连接选定的硫族化物岛的探针的可移动MEMS平台。 设置在存储器层和MEMS层外部的高电压源可以向存储器层上的定子电极和MEMS平台上的转子电极提供高电压,以控制MEMS平台相对于存储介质的移动。 存储装置可以用于诸如媒体播放器和蜂窝电话的便携式电子设备中,以提供信息的非易失性存储。

    GAS PHASE CHEMICAL SENSOR BASED ON FILM BULK RESONATORS (FBAR)
    5.
    发明申请
    GAS PHASE CHEMICAL SENSOR BASED ON FILM BULK RESONATORS (FBAR) 审中-公开
    基于薄膜共振器(FBAR)的气相化学传感器

    公开(公告)号:WO2007005701A2

    公开(公告)日:2007-01-11

    申请号:PCT/US2006025755

    申请日:2006-06-29

    Abstract: An FBAR device may be chemically functionalized by depositing an interactive layer so that targeted chemicals are preferentially adsorbed. Such miniaturized chemical sensors may be combined with wireless network technology. For example, a chemical sensor may be integrated in a cell phone, PDA, a watch, or a car with wireless connection and GPS. Since such devices are widely populated, a national sensor network may be established. Consequently, a national toxicity map can be generated in real time. Detailed chemical information may be obtained, such as if a chemical is released by a source fixed on ground or by a moving object, or if is spread by explosives or by wind and so on.

    Abstract translation: FBAR器件可以通过沉积交互层进行化学功能化,从而优先吸附目标化学物质。 这种小型化学传感器可以与无线网络技术组合。 例如,化学传感器可以集成在具有无线连接和GPS的手机,PDA,手表或汽车中。 由于这样的设备被广泛地填充,所以可以建立国家传感器网络。 因此,可以实时生成国家毒性图。 可以获得详细的化学信息,例如化学品被固定在地面上的源或被移动的物体释放,或者如果被爆炸物或风等传播。

    LASER EXPOSURE OF PHOTOSENSITIVE MASKS FOR DNA MICROARRAY FABRICATION
    10.
    发明申请
    LASER EXPOSURE OF PHOTOSENSITIVE MASKS FOR DNA MICROARRAY FABRICATION 审中-公开
    激光曝光用于DNA微量制备的光敏掩模

    公开(公告)号:WO2004065635A3

    公开(公告)日:2005-02-03

    申请号:PCT/US0337839

    申请日:2003-11-26

    Applicant: INTEL CORP

    Abstract: A method and apparatus for forming a polymer array on a substrate suitable for synthesizing polymer sequences. This includes forming an array, each location of the array having at least one strand end, forming photosensitive protection on the strand ends, and selectively scanning and modulating at least one energy beam to expose a pattern on the photosensitive protection. In some embodiments, the method further includes removing a protective group from selected strand ends based on the exposed pattern. The method then includes adding a predetermined one or more polymeric subunits to the deprotected strand ends. In some embodiments the photosensitive protection includes a layer of photoresist to cover the strand ends. Some embodiments use an ultra-violet laser.

    Abstract translation: 一种在适于合成聚合物序列的基材上形成聚合物阵列的方法和装置。 这包括形成阵列,阵列的每个位置具有至少一个绞合端,在绞合端上形成感光保护,并且选择性地扫描和调制至少一个能量束以暴露感光保护上的图案。 在一些实施方案中,该方法还包括基于暴露图案从选定的链末端去除保护基团。 该方法然后包括将预定的一个或多个聚合物亚单位加入去保护的末端。 在一些实施例中,感光保护包括一层光致抗蚀剂以覆盖绞合端。 一些实施例使用紫外激光。

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